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LIGA技术同步辐射X射线光刻

成果统计

合作作者[TOP 5]

  • 刘静

    合作成果数：46

  • 王波

    合作成果数：42

  • 张天冲

    合作成果数：35

  • 张菊芳

    合作成果数：32

  • 彭良强

    合作成果数：26

访问统计


  总访问量
 1511
  访问来源
    内部： 2
    外部： 1509
    国内： 1330
    国外： 181

  年访问量
 63
  访问来源
    内部： 0
    外部： 63
    国内： 45
    国外： 18

  月访问量
 0
  访问来源
    内部： 0
    外部： 0
    国内： 0
    国外： 0

访问量

访问量

1. 基于磁流变技术的微孔内壁抛光装置研制及性能研究 [490]
2. 北京同步辐射装置(BSRF)3B1束线精细调试 [474]
3. 背面曝光技术制作沙漏状X射线组合折射透镜 [469]
4. SX-VISIBLE PHOTON-BEAM LINES 3B1A FOR LITHOGRAPHY AND 3B1B FOR BIO.. [467]
5. Photoelectric characteristics of silicon P-N junction with nanopil.. [452]
6. 抛物面型X射线组合折射透镜聚焦性能的理论与实验研究 [412]
7. Investigation of GEM-Micromegas detector on X-ray beam of synchrot.. [395]
8. Hourglass-shaped X-ray compound refractive lens made by back-mask .. [394]
9. X射线长组合折射透镜的理论和实验研究 [383]
10. Theoretical and experimental results of focusing performance for t.. [379]
11. Dynamic properties of a metal photo-thermal micro-actuator [374]
12. LIGA技术的掩模制造 [349]
13. Controllable Generation of Nitric Oxide by Near-Infrared-Sensitize.. [331]
14. A new sacrificial layer method of LIGA technology to fabricate mov.. [326]
15. 利用LIGA技术制造夹钳 [317]
16. A fabrication method of high frequency structure for THz Travellin.. [305]
17. 微细加工新技术—LIGA技术 [292]
18. Fabrication of inverted pyramid structure by Cesium Chloride self-.. [288]
19. 硅光电池纳米织构化P-N结结构及其制作方法 [284]
20. 电铸在LIGA技术中的应用 [273]
21. Sidewall smoothing of micro-pore optics by ion beam etching [273]
22. 同步辐射X射线深度光刻实验 [264]
23. A method to fabricate high-aspect-ratio microstructures using PMMA.. [260]
24. Fabrication of high energy X-ray compound kinoform lenses using X-.. [226]
25. Hydride vapor phase epitaxy of strain-reduced GaN film on nano-isl.. [225]
26. 高增益型气体电子倍增微网结构探测器的性能研究 [223]
27. 微网气体探测器微结构SPACER的研制 [223]
28. Fabrication of folded waveguide for traveling wave tube by ultra-v.. [218]
29. Research survey of electroformed nickel material properties used i.. [217]
30. Fabrication of absorption gratings with X-ray lithography for X-ra.. [214]
31. 50nm及50nm以下同步辐射X射线光刻光束线设计 [212]
32. 北京同步辐射装置1B3前端区真空设计 [212]
33. Photoacoustic microbeam-oscillator with tunable resonance directio.. [212]
34. Fabrication of microelectrodes on diamond anvil for the resistance.. [211]
35. 气体电子倍增器(GEM)聚酰亚胺膜结构的研制 [210]
36. Fabrication and Photovoltaic Characteristics of Silicon Nanoscrew .. [207]
37. micro-bulk工艺micromegas的研究 [206]
38. Light-extraction enhancement of freestanding GaN-based flip-chip l.. [203]
39. LIGA和微细EDM技术制造不锈钢微结构的研究 [202]
40. 博士论文-LIGA技术研究 [200]
41. X-ray lithography technology for the fabrication of deep-submicron.. [200]
42. 一种利用离子束刻蚀技术抛光微结构侧壁的方法 [199]
43. Overcoming the Problem of Electrical Contact to Solar Cells Fabric.. [199]
44. LIGA技术制备正电子慢化体的实验研究 [198]
45. BSRF上同步辐射深度光刻的实验研究 [197]
46. Study of TWT Slow Wave Structure Microfabricated by Ultraviolet La.. [195]
47. The study of micro-bulk micromegas [194]
48. Fabrication and Photosensitivity of CdS/Silicon Nanoscrew Photores.. [192]
49. x光纳米光刻掩模的离子束制备法 [189]
50. 同步辐射光刻技术研究进展 [187]
51. 利用背面曝光技术制造大高宽比SU8结构的一种新方法(英文) [186]
52. X射线光刻技术应用现状与前景 [186]
53. Microfabrication of folded waveguide using UV-LIGA for 220 GHz tra.. [186]
54. Improving light extraction of InGaN-based light emitting diodes wi.. [185]
55. Nanopillars on Unpolished Substrates and Their Application in Larg.. [182]
56. Microstructure change of ZnO nanowire induced by energetic x-ray r.. [181]
57. 电火花加工用的极长异形微细电极的制造方法 [179]
58. Nanopillars by cesium chloride self-assembly and dry etching [178]
59. Influence of the bridges on prism-array lens focusing for high ene.. [178]
60. 氯化铯纳米岛生长技术 [176]
61. Fabrication and antireflection properties of solar cells with pyra.. [176]
62. The application of multilayer elastic beam in MEMS safe and arming.. [176]
63. Radiation character of 3W1 permanent magnet multipole wiggler [176]
64. X射线镂空硅掩模在同步辐射X射线深层光刻中的应用 [173]
65. Design and property study of micro-slot optics [173]
66. LIGA技术在先进模具制造中的应用 [172]
67. 利用LIGA技术制作过滤介质 [171]
68. Study of bulk micromegas detector [169]
69. Structure fabrication of PI film for GEM detector [169]
70. 一种气液混合喷嘴结构及其制作方法 [167]
71. 上牺牲层加工方法 [167]
72. Fabrication of PMMA hard X-ray compound Kinoform lenses [167]
73. The performance of silicon solar cell with selective pillars fabri.. [164]
74. 用三层胶工艺X射线光刻制作T型栅 [161]
75. 悬空金属微条探头的制造 [154]
76. 悬空微条气体室X、γ射线探测器 [152]
77. 甲基丙烯酸甲酯共聚物作为LIGA抗蚀剂的研究 [152]
78. Study of bulk micromegas detector [152]
79. 质子LIGA工艺的探讨 [151]
80. 一种采用双面对准的硅LIGA掩模制作研究 [150]
81. 基于LIGA技术的光热驱动微开关研究 [150]
82. Fabrication of silicon nitride/refractory metal tantalum X-ray mas.. [150]
83. Change in crystalline structure of W18O49 nanowires induced by X-r.. [150]
84. Upgrading design of the 3BILA beamline for x-ray nanometre lithogr.. [149]
85. 利用LIGA技术研制微细电火花异形和阵列结构电极 [148]
86. New wiggler beamlines at BSRF [148]
87. PMMA在LIGA技术中的应用 [144]
88. 50 nm X射线光刻掩模制备关键技术 [144]
89. 一种用于LIGA技术的光刻胶膜与基片的复合结构的制备方法 [143]
90. 深亚微米X射线光刻模拟软件XLSS1.0 [141]
91. 微细电火花加工用的成形电极的制造方法 [140]
92. Study on synchrotron radiation lithography at BSRF [140]
93. 纳米岛光刻技术及其应用 [139]
94. Annealing temperature and property of Hf used for FWG-TWT [139]
95. Local reconstruction in computed tomography of diffraction enhance.. [139]
96. A new process to fabricate the electromagnetic stepping micromotor.. [138]
97. 同步辐射讲座 第五讲 微电子机械系统加工新方法——LIGA技术 [136]
98. 0.5μm分辨率同步辐射X射线光刻技术 [134]
99. 3B1束线上LIGA掩模的设计研究 [133]
100. Enhancement in the Light Output Power of GaN-Based Light-Emitting .. [132]

下载量

1. 上牺牲层加工方法 [16]
2. X-ray lithography technology for the fabrication of deep-submicron.. [13]
3. Fabrication and Photovoltaic Characteristics of Silicon Nanoscrew .. [10]
4. 微细结构塑料模压机 [9]
5. 博士论文-LIGA技术研究 [8]
6. 微细电火花加工用的成形电极的制造方法 [8]
7. LIGA技术的掩模制造 [7]
8. 气体电子倍增器(GEM)聚酰亚胺膜结构的研制 [7]
9. 一种气液混合喷嘴结构及其制作方法 [6]
10. 电火花加工用的极长异形微细电极的制造方法 [6]
11. 一种全金属光栅 [6]
12. 一种全金属码盘 [6]
13. 利用LIGA技术制造夹钳 [6]
14. 一种利用离子束刻蚀技术抛光微结构侧壁的方法 [5]
15. 高增益型气体电子倍增微网结构探测器的性能研究 [5]
16. 同步辐射讲座 第五讲 微电子机械系统加工新方法——LIGA技术 [5]
17. Hydride vapor phase epitaxy of strain-reduced GaN film on nano-isl.. [5]
18. Dynamic properties of a metal photo-thermal micro-actuator [5]
19. Controllable Generation of Nitric Oxide by Near-Infrared-Sensitize.. [5]
20. Fabrication of folded waveguide for traveling wave tube by ultra-v.. [5]
21. 一种在硅衬底表面涂覆光刻胶的方法 [4]
22. 微型磁力步进电机的制造方法 [4]
23. 利用背面曝光技术制造大高宽比SU8结构的一种新方法(英文) [4]
24. Study on new type LIGA mask fabrication technique [4]
25. Microfabrication of folded waveguide using UV-LIGA for 220 GHz tra.. [4]
26. 一种具有纳米结构表面的硅材料及其制作方法 [3]
27. 一种用于LIGA技术的光刻胶膜与基片的复合结构的制备方法 [3]
28. 北京同步辐射装置(BSRF)3B1束线精细调试 [3]
29. 纳米岛光刻技术及其应用 [3]
30. Investigation of GEM-Micromegas detector on X-ray beam of synchrot.. [3]
31. Sidewall smoothing of micro-pore optics by ion beam etching [3]
32. Study of TWT Slow Wave Structure Microfabricated by Ultraviolet La.. [3]
33. 北京同步辐射装置1B3前端区真空设计 [3]
34. 悬空微条气体室X、γ射线探测器 [2]
35. 同步辐射X射线深度光刻实验 [2]
36. 甲基丙烯酸甲酯共聚物作为LIGA抗蚀剂的研究 [2]
37. LIGA技术制备正电子慢化体的实验研究 [2]
38. 同步辐射光刻技术研究进展 [2]
39. 3B1束线上LIGA掩模的设计研究 [2]
40. 利用紫外光刻技术进行SU8胶的研究 [2]
41. 50 nm X射线光刻掩模制备关键技术 [2]
42. X射线光刻技术应用现状与前景 [2]
43. 微网气体探测器微结构SPACER的研制 [2]
44. Light-extraction enhancement of freestanding GaN-based flip-chip l.. [2]
45. LIGA技术在先进模具制造中的应用 [2]
46. The application of multilayer elastic beam in MEMS safe and arming.. [2]
47. Fabrication of inverted pyramid structure by Cesium Chloride self-.. [2]
48. New wiggler beamlines at BSRF [2]
49. Radiation character of 3W1 permanent magnet multipole wiggler [2]
50. Hourglass-shaped X-ray compound refractive lens made by back-mask .. [2]
51. 一种利用电铸技术制造旋转异型金属微孔喷嘴的方法 [1]
52. 微细加工新技术—LIGA技术 [1]
53. Study of bulk micromegas detector [1]
54. X射线镂空硅掩模在同步辐射X射线深层光刻中的应用 [1]
55. PMMA在LIGA技术中的应用 [1]
56. 利用LIGA技术制作过滤介质 [1]
57. LIGA和微细EDM技术制造不锈钢微结构的研究 [1]
58. 微流路生物芯片的研制 [1]
59. 用三层胶工艺X射线光刻制作T型栅 [1]
60. 背面曝光技术制作沙漏状X射线组合折射透镜 [1]
61. X射线长组合折射透镜的理论和实验研究 [1]
62. 抛物面型X射线组合折射透镜聚焦性能的理论与实验研究 [1]
63. 基于LIGA技术的光热驱动微开关研究 [1]
64. micro-bulk工艺micromegas的研究 [1]
65. BSRF上同步辐射深度光刻的实验研究 [1]
66. 50nm及50nm以下同步辐射X射线光刻光束线设计 [1]
67. Fabrication and antireflection properties of solar cells with pyra.. [1]
68. Photoelectric characteristics of silicon P-N junction with nanopil.. [1]
69. The performance of silicon solar cell with selective pillars fabri.. [1]
70. Fabrication of silicon nitride/refractory metal tantalum X-ray mas.. [1]
71. Research survey of electroformed nickel material properties used i.. [1]
72. Upgrading design of the 3BILA beamline for x-ray nanometre lithogr.. [1]
73. Structure fabrication of PI film for GEM detector [1]
74. Improving light extraction of InGaN-based light emitting diodes wi.. [1]
75. SX-VISIBLE PHOTON-BEAM LINES 3B1A FOR LITHOGRAPHY AND 3B1B FOR BIO.. [1]
76. Theoretical and experimental results of focusing performance for t.. [1]
77. Nanopillars by cesium chloride self-assembly and dry etching [1]
78. Fabrication of PMMA hard X-ray compound Kinoform lenses [1]
79. A method to fabricate high-aspect-ratio microstructures using PMMA.. [1]
80. Influence of the bridges on prism-array lens focusing for high ene.. [1]