Sidewall smoothing of micro-pore optics by ion beam etching | |
Zhang TC(张天冲)![]() ![]() ![]() ![]() ![]() ![]() | |
2015 | |
发表期刊 | SURFACE & COATINGS TECHNOLOGY (IF:2.589[JCR-2016],2.538[5-Year]) |
ISSN | 0257-8972 |
卷号 | 278页码:127-131 |
通讯作者 | 张天冲 |
文章类型 | Article |
摘要 | Ion beam was employed to smooth the sidewall surfaces of square pores with high aspect ratio in micro-pore optics (MPO) fabricated using LIGA technique. A small plate tilt angle of 20 was chosen during the smoothing process considering the high aspect ratio of the pores. The evolution of the spatial relation between the incident ion beam and the target surface with sample rotating was investigated. The R-q roughness values decreased from 7.1 to 3.6 nm after 240-minute smoothing by ion beam (E-ion = 400 eV, Flux(ion) = 0.2 mA/cm(2)) and the surface morphology evolution with smoothing time was studied. The smoothing occurred with a grazing angle even less than 2, indicating that ion beam may be a promising technique to smooth sidewalls of micro-pores with high aspect ratio. (C) 2015 Elsevier B.V. All rights reserved. |
关键词 | Sidewall Smooth Polish Micro-pore optics Ion beam |
学科领域 | Materials Science; Physics |
DOI | 10.1016/j.surfcoat.2015.08.009 |
收录类别 | SCI ; EI ; CA |
语种 | 英语 |
WOS研究方向 | Materials Science, Coatings & Films ; Physics, Applied |
WOS类目 | Materials Science ; Physics |
WOS记录号 | WOS:000361934800018 |
引用统计 | 正在获取...
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文献类型 | 期刊论文 |
条目标识符 | https://ir.ihep.ac.cn/handle/311005/228760 |
专题 | 多学科研究中心 |
推荐引用方式 GB/T 7714 | Zhang TC,Yi FT,Wang B,et al. Sidewall smoothing of micro-pore optics by ion beam etching[J]. SURFACE & COATINGS TECHNOLOGY,2015,278:127-131. |
APA | 张天冲.,伊福廷.,王波.,刘静.,张新帅.,...&Sun, GJ.(2015).Sidewall smoothing of micro-pore optics by ion beam etching.SURFACE & COATINGS TECHNOLOGY,278,127-131. |
MLA | 张天冲,et al."Sidewall smoothing of micro-pore optics by ion beam etching".SURFACE & COATINGS TECHNOLOGY 278(2015):127-131. |
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