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Sidewall smoothing of micro-pore optics by ion beam etching
Zhang TC(张天冲); Yi FT(伊福廷); Wang B(王波); Liu J(刘静); Zhang XS(张新帅); Sun GJ(孙钢杰); Zhang, TC; Yi, FT; Wang, B; Liu, J; Zhang, XS; Sun, GJ
2015
发表期刊SURFACE & COATINGS TECHNOLOGY
卷号278页码:127-131
通讯作者张天冲
文章类型Article
摘要Ion beam was employed to smooth the sidewall surfaces of square pores with high aspect ratio in micro-pore optics (MPO) fabricated using LIGA technique. A small plate tilt angle of 20 was chosen during the smoothing process considering the high aspect ratio of the pores. The evolution of the spatial relation between the incident ion beam and the target surface with sample rotating was investigated. The R-q roughness values decreased from 7.1 to 3.6 nm after 240-minute smoothing by ion beam (E-ion = 400 eV, Flux(ion) = 0.2 mA/cm(2)) and the surface morphology evolution with smoothing time was studied. The smoothing occurred with a grazing angle even less than 2, indicating that ion beam may be a promising technique to smooth sidewalls of micro-pores with high aspect ratio. (C) 2015 Elsevier B.V. All rights reserved.
关键词Sidewall Smooth Polish Micro-pore optics Ion beam
学科领域Materials Science; Physics
DOI10.1016/j.surfcoat.2015.08.009
收录类别SCI ; EI ; CA
WOS类目Materials Science, Coatings & Films ; Physics, Applied
WOS记录号WOS:000361934800018
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/228760
专题多学科研究中心
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Zhang TC,Yi FT,Wang B,et al. Sidewall smoothing of micro-pore optics by ion beam etching[J]. SURFACE & COATINGS TECHNOLOGY,2015,278:127-131.
APA 张天冲.,伊福廷.,王波.,刘静.,张新帅.,...&Sun, GJ.(2015).Sidewall smoothing of micro-pore optics by ion beam etching.SURFACE & COATINGS TECHNOLOGY,278,127-131.
MLA 张天冲,et al."Sidewall smoothing of micro-pore optics by ion beam etching".SURFACE & COATINGS TECHNOLOGY 278(2015):127-131.
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