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Focusing high-energy x-rays by a PMMA compound x-ray lens on Beijing synchrotron radiation facility 期刊论文
CHINESE PHYSICS, 2007, 卷号: 16, 期号: 4, 页码: 984-988
Authors:  Le, ZC;  Liang, JQ;  Dong, W;  Zhu, PP;  Peng, LQ;  Wang, WB;  Huang, WX;  Yuan, QX;  Wang, JY;  Zhu PP(朱佩平);  Peng LQ(彭良强);  Huang WX(黄万霞);  Yuan QX(袁清习);  Wang JY(王寯越)
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PMMA compound x-ray lens  focusing performance  Beijing synchrotron radiation facility (BSRF)  
高能X射线组合透镜聚焦性能的实验结果 期刊论文
光学学报, 2006, 期号: 2, 页码: 317-320
Authors:  乐孜纯;  梁静秋;  董文;  王维彪;  朱佩平;  黄万霞;  袁清习;  王寯越;  彭良强;  全必胜;  姚劲松
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X射线光学  X射线组合透镜  聚焦性能  同步辐射  
Control of deposition channels in nanosphere templates for high-density nanodot array production 期刊论文
NANOTECHNOLOGY, 2005, 卷号: 16, 期号: 9, 页码: 1693-1696
Authors:  Wu, PW;  Peng LQ(彭良强);  Peng, LQ;  Tuo, XL;  Wang, XG;  Yuan, J
Adobe PDF(645Kb)  |  Favorite  |  View/Download:72/0  WOS cited times:[0]  ADS cited times:[7]  |  Submit date:2016/06/29
电火花加工用的极长异形微细电极的制造方法 专利
专利类型: 撤回, 专利号: CN1778505, 申请日期: 2004-11-19, 公开日期: 2006-05-31
Inventors:  彭良强;  伊福廷;  张菊芳;  韩勇
Adobe PDF(318Kb)  |  Favorite  |  View/Download:145/6  |  Submit date:2015/10/13
Upgrading design of the 3BILA beamline for x-ray nanometre lithography of microelectronic devices at BSRF 期刊论文
CHINESE PHYSICS, 2004, 卷号: 13, 期号: 5, 页码: 731-736
Authors:  Yi FT(伊福廷);  Peng LQ(彭良强);  Zhang JF(张菊芳);  Han Y(韩勇);  Yi, FT;  Ye, TC;  Peng, LQ;  Chen, DP;  Zhang, JF;  Han, Y
Adobe PDF(237Kb)  |  Favorite  |  View/Download:106/1  WOS cited times:[0]  |  Submit date:2016/06/28
synchrotron radiation  x-ray  x-ray lithography  synchrotron radiation beamline  
50nm及50nm以下同步辐射X射线光刻光束线设计 期刊论文
核技术, 2004, 期号: 5, 页码: 321-324
Authors:  谢常青;  陈大鹏;  李兵;  叶甜春;  伊福廷;  彭良强;  韩勇;  张菊芳
Adobe PDF(278Kb)  |  Favorite  |  View/Download:170/1  |  Submit date:2016/01/25
X射线光刻  同步辐射  束衍生法  光刻分辨率  
基于LIGA技术的微细电火花加工 期刊论文
机械工人.冷加工, 2004, 期号: 1, 页码: 26-28
Authors:  彭良强
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微细电火花加工  LIGA技术  微细加工技术  工具电极  微型机电系统  研究机构  喷墨打印机  成形电极  特种加工  磨削工艺  
利用背面曝光技术制造大高宽比SU8结构的一种新方法(英文) 期刊论文
半导体学报, 2004, 期号: 1, 页码: 26-29
Authors:  伊福廷;  缪鹏;  彭良强;  张菊芳;  韩勇
Adobe PDF(147Kb)  |  Favorite  |  View/Download:122/4  |  Submit date:2015/12/25
MEMS  SU8胶  微加工  背面曝光  
基于LIGA技术的微细电火花加工优化研究 期刊论文
电加工与模具, 2004, 期号: S1, 页码: 39-41+94
Authors:  邹丽芸;  张院春;  彭良强;  黄军容;  伊福廷;  张菊芳;  韩勇
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微细加工  LIGA技术  电火花加工  
50 nm X射线光刻掩模制备关键技术 期刊论文
核技术, 2004, 期号: 2, 页码: 96-98
Authors:  董立军;  陈大鹏;  谢常青;  韩敬东;  叶甜春;  伊福廷;  彭良强;  韩勇;  张菊芳
Adobe PDF(143Kb)  |  Favorite  |  View/Download:106/2  |  Submit date:2015/12/25
X射线光刻  掩模  金刚石  吸收体  键合