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微网气体探测器微结构SPACER的研制 期刊论文
微纳电子技术, 2009, 期号: 7, 页码: 419-423
Authors:  侯凤杰;  伊福廷;  樊瑞睿;  张菊芳;  廖元勋;  陈元柏;  欧阳群
Adobe PDF(864Kb)  |  Favorite  |  View/Download:65/2  |  Submit date:2015/12/25
多丝正比室  微网气体探测器  SU8胶  干膜  丝网