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多学科研究中心 [1]
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ZhongHua ... [1]
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Journal ar... [1]
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2007 [1]
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物理学报 [1]
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微晶硅薄膜的表面粗糙度及其生长机制的X射线掠角反射研究
期刊论文
物理学报, 2007, 期号: 4, 页码: 2422-2427
Authors:
周炳卿
;
刘丰珍
;
朱美芳
;
周玉琴
;
吴忠华
;
陈兴
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Submit date:2015/12/25
X射线掠角反射
微晶硅薄膜
表面粗糙度
生长机制