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磁控溅射法制备极紫外6.8~11.0 nm波段Mo/B_4C横向梯度多层膜 期刊论文
强激光与粒子束, 2018, 卷号: 30, 期号: 6, 页码: 61001
Authors:  朱京涛;  李淼;  朱圣明;  张嘉怡;  冀斌;  崔明启
Adobe PDF(2361Kb)  |  Favorite  |  View/Download:130/1  |  Submit date:2019/09/24
极紫外  横向梯度多层膜  Mo/B4C  磁控溅射  同步辐射