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Studies on surface roughness and growth mechanisms of microcrystalline silicon films by grazing incidence X-ray reflectivity 期刊论文
ACTA PHYSICA SINICA, 2007, 卷号: 56, 期号: 4, 页码: 2422-2427
Authors:  Zhou, BQ;  Liu, FZ;  Zhu, MF;  Zhou, YQ;  Wu, ZH;  Chen, X;  Wu ZH(吴忠华);  Chen X(陈兴)
Adobe PDF(245Kb)  |  Favorite  |  View/Download:91/0  WOS cited times:[0]  |  Submit date:2016/06/29
grazing incidence X-ray reflectivity  microcrystalline silicon film  surface roughness  growth mechanism  
微晶硅薄膜的表面粗糙度及其生长机制的X射线掠角反射研究 期刊论文
物理学报, 2007, 期号: 4, 页码: 2422-2427
Authors:  周炳卿;  刘丰珍;  朱美芳;  周玉琴;  吴忠华;  陈兴
Adobe PDF(276Kb)  |  Favorite  |  View/Download:308/1  |  Submit date:2015/12/25
X射线掠角反射  微晶硅薄膜  表面粗糙度  生长机制