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Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics
D. Shu; J.W.J. Anton; L. Assoufid; S.J. Bean; D. Capatina; V. De Andrade; E.M. Dufresne; T. Graber; R. Harder; D. Haskel; K. Jasionowski; S.P. Kearney; A.A. Khan; B. Lai; W. Liu; J. Maser; S.T. Mashrafi; G.K. Mistri; S. Narayanan; C.A. Preissner; M. Ramanathan; L. Rebuffi; R. Reininger; O.A. Schmidt; X. Shi; J.Z. Tischler; K.J. Wakefield; D. Walko; J. Wang; X. Zhang
2021
Source PublicationProceedings of the 11th International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation
Conference Date2021
Conference PlaceChicago
Language英语
Document Type会议论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/292683
Collection学术会议_国际参会_JaCoW高能所参会会议_MEDSI
AffiliationANL, Lemont, Illinois, USA
Recommended Citation
GB/T 7714		 D. Shu,J.W.J. Anton,L. Assoufid,et al. Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics[C],2021.
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TUPC10.pdf（1521KB）会议论文 开放获取CC BY-NC-SAApplication Full Text
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