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博士学位论文—基于CL成像的IGBT缺陷检测研究
Alternative TitleStudy of IGBT Defect Detection Based on CL Imaging
李琰
Subtype理学博士
Thesis Advisor魏存峰 ; 刘双全
2021-05-21
Degree Grantor中国科学院大学
Place of Conferral北京
Degree Discipline粒子物理与原子核物理
Pages103
Language中文
Document Type学位论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/289935
Collection核技术应用研究中心
Affiliation中国科学院高能物理研究所
Recommended Citation
GB/T 7714
李琰. 博士学位论文—基于CL成像的IGBT缺陷检测研究[D]. 北京. 中国科学院大学,2021.
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