IHEP OpenIR  > 东莞研究部
博士学位论文—TiZrV吸气剂薄膜性能及成膜工艺参数研究
Alternative TitleStudy on Performance and Process Parameters of TiZrV Getter Film
孙晓阳
Subtype工学博士
Thesis Advisor董海义
2021-05-14
Degree Grantor中国科学院大学
Place of Conferral北京
Degree Discipline核技术及应用
Pages112
Language中文
Document Type学位论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/289913
Collection东莞研究部
Affiliation中国科学院高能物理研究所
Recommended Citation
GB/T 7714
孙晓阳. 博士学位论文—TiZrV吸气剂薄膜性能及成膜工艺参数研究[D]. 北京. 中国科学院大学,2021.
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