| Fabrication of microelectrodes on diamond anvil for the resistance measurement in high pressure experiment | |
Liu J(刘静) ; Li YC(李延春); Zhang JR(张俊然); Yi FT(伊福廷); Liu, J; Cheng, H; Li, YC; Zhang, JR; Yi, FT
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| 2018 | |
| Source Publication | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
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| ISSN | 0946-7076 |
| EISSN | 1432-1858 |
| Volume | 24Issue:7Pages:3193-3199 |
| Subtype | Article |
| Abstract | Diamond anvil cell techniques are now well established as a powerful and wide useful method to measure the properties of materials in the very high pressure experiment. However, the measurement of material resistance at the high pressure in the experiment is a big challenge because the electrodes are difficult to be made on the diamond anvil with small top area of the 0.3 mm diameter and have good contact with the sample under the extreme high pressure conditions. In this paper, a new method is used to fabricate the microelectrodes on the diamond anvil surface for the high pressure experiment. Firstly, a special Nickel shadow mask with the electrode patterns, which is made by micro-fabrication technology, is installed and fixed onto the diamond anvil surface with the glue by aligning the electrodes of the shadow mask with the center of the diamond anvil under the microscope. Then, the metal film is deposited onto the anvil with nickel shadow mask by magnetron sputtering. Finally, the microelectrodes having the same patterns with the hollowed structures of the shadow mask can be made with the sputtering material to adhere on the diamond anvil surface after the removal of the shadow mask off the anvil. This new method is simpler, easier to be operated, and less pollution produced to the diamond anvil cell than the traditional method. |
| DOI | 10.1007/s00542-018-3801-x |
| WOS Keyword | HYDROSTATIC-PRESSURE ; RAMAN-SCATTERING ; CELL ; DEPENDENCE ; SYSTEM ; GAP |
| Indexed By | SCI ; EI |
| Language | 英语 |
| WOS Research Area | Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics |
| WOS Subject | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
| WOS ID | WOS:000435585500032 |
| EI Accession Number | 20180804820127 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.ihep.ac.cn/handle/311005/286037 |
| Collection | 多学科研究中心 实验物理中心 |
| Affiliation | 中国科学院高能物理研究所 |
| First Author Affilication | Institute of High Energy |
| Recommended Citation GB/T 7714 | Liu J,Li YC,Zhang JR,et al. Fabrication of microelectrodes on diamond anvil for the resistance measurement in high pressure experiment[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2018,24(7):3193-3199. |
| APA | 刘静.,李延春.,张俊然.,伊福廷.,Liu, J.,...&Yi, FT.(2018).Fabrication of microelectrodes on diamond anvil for the resistance measurement in high pressure experiment.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,24(7),3193-3199. |
| MLA | 刘静,et al."Fabrication of microelectrodes on diamond anvil for the resistance measurement in high pressure experiment".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 24.7(2018):3193-3199. |
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