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博士学位论文—基于LIGA技术的微结构光学器件的研制及其性能研究
Alternative TitleThe property research of the micro-structure optics devices with fabrication of LIGA process
王雨婷
Subtype理学博士
Thesis Advisor伊福廷
2019-05-16
Degree Grantor中国科学院大学
Place of Conferral北京
Degree Discipline凝聚态物理
Pages120
Language中文
Document Type学位论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/284131
Collection多学科研究中心
Recommended Citation
GB/T 7714
王雨婷. 博士学位论文—基于LIGA技术的微结构光学器件的研制及其性能研究[D]. 北京. 中国科学院大学,2019.
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