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Fabrication of a multilayered optical device based on submicron polyimide film
Hu W(胡渭); Chen TX(陈田祥); Chen Y(陈勇)
2016
发表期刊PROCEEDINGS OF THE 2016 4TH INTERNATIONAL CONFERENCE ON MACHINERY, MATERIALS AND COMPUTING TECHNOLOGY
卷号60页码:897
通讯作者胡渭 ; 陈田祥 ; 陈勇
摘要A submicron polyimide film (< 1 mu m) with high thickness uniformity was prepared via spin-coating method. Aluminum foil and patterned nickel mesh were sequentially fabricated on the surface of polyimide film using magnetron sputtering and micro-electroforming. Transmittance of the device in UV-vis waveband indicated that the thickness of aluminum plays a dominant important role rather than the other layers. The results of atomic oxygen erosion experiment of the multilayered structure, investigated by ground-based simulation facility, suggests that the Al foil was capable of protecting PI film from atomic oxygen erosion.
文章类型Proceedings Paper
关键词polyimide filter film space mission atomic oxygen
DOI10.2991/icmmct-16.2016.178
关键词[WOS]COATINGS ; CU
语种英语
WOS记录号WOS:000387481800178
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文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/260812
专题粒子天体物理中心
作者单位中国科学院高能物理研究所
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Hu W,Chen TX,Chen Y. Fabrication of a multilayered optical device based on submicron polyimide film[J]. PROCEEDINGS OF THE 2016 4TH INTERNATIONAL CONFERENCE ON MACHINERY, MATERIALS AND COMPUTING TECHNOLOGY,2016,60:897.
APA 胡渭,陈田祥,&陈勇.(2016).Fabrication of a multilayered optical device based on submicron polyimide film.PROCEEDINGS OF THE 2016 4TH INTERNATIONAL CONFERENCE ON MACHINERY, MATERIALS AND COMPUTING TECHNOLOGY,60,897.
MLA 胡渭,et al."Fabrication of a multilayered optical device based on submicron polyimide film".PROCEEDINGS OF THE 2016 4TH INTERNATIONAL CONFERENCE ON MACHINERY, MATERIALS AND COMPUTING TECHNOLOGY 60(2016):897.
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