IHEP OpenIR  > 多学科研究中心
Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method
Yang FG(杨福桂); Cai Q(蔡泉); Liu P(刘鹏); Sheng WF(盛伟繁); Zhang XW(张晓伟); Li M(李明); Yang, FG; Cai, Q; Liu, P; Sheng, WF; Zhang, XW; Li, M
2016
发表期刊8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS
卷号9687页码:-
通讯作者杨福桂
摘要The quality of X-ray optics on beamline is a key factor that limits the performance of the beam line to play. For X-ray mirror surface characterization with high accuracy, long trace profiler and NOM for flat or slight curved mirror have been developed. However, these two kind of instruments cannot measure the highly curved mirror since requirement of high precision and that of large range contradict each other. In this paper, we proposed a novel wavefront-coding-based surface slope metrology technique. Four-dimension information of the optics under test, including x-y position and sagittal/tangential angle, is provided. Due to the focused beam used and the high speed DMD (Digital Mirror Device), high spatial resolution of the measurement is obtained. In experiment, we demonstrated this technique by measuring bend-based high energy monochromator developed in BSRF.
文章类型期刊论文
关键词slope profiler X-ray optics wavefront coding spatial modulator
DOI10.1117/12.2244271
关键词[WOS]OPTICS
语种英语
WOS类目Optics ; Physics, Applied
WOS记录号WOS:000387730600005
引用统计
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/260482
专题多学科研究中心
粒子天体物理中心
作者单位中国科学院高能物理研究所
推荐引用方式
GB/T 7714
Yang FG,Cai Q,Liu P,et al. Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method[J]. 8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS,2016,9687:-.
APA 杨福桂.,蔡泉.,刘鹏.,盛伟繁.,张晓伟.,...&Li, M.(2016).Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method.8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS,9687,-.
MLA 杨福桂,et al."Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method".8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS 9687(2016):-.
条目包含的文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
20161252.pdf(695KB)期刊论文作者接受稿限制开放CC BY-NC-SA请求全文
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[杨福桂]的文章
[蔡泉]的文章
[刘鹏]的文章
百度学术
百度学术中相似的文章
[杨福桂]的文章
[蔡泉]的文章
[刘鹏]的文章
必应学术
必应学术中相似的文章
[杨福桂]的文章
[蔡泉]的文章
[刘鹏]的文章
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。