Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method
Yang FG(杨福桂); Cai Q(蔡泉); Liu P(刘鹏); Sheng WF(盛伟繁); Zhang XW(张晓伟); Li M(李明); Yang, FG; Cai, Q; Liu, P; Sheng, WF; Zhang, XW; Li, M
刊名8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS
2016
卷号9687页码:-
关键词slope profiler X-ray optics wavefront coding spatial modulator
DOI10.1117/12.2244271
通讯作者杨福桂
文章类型期刊论文
英文摘要The quality of X-ray optics on beamline is a key factor that limits the performance of the beam line to play. For X-ray mirror surface characterization with high accuracy, long trace profiler and NOM for flat or slight curved mirror have been developed. However, these two kind of instruments cannot measure the highly curved mirror since requirement of high precision and that of large range contradict each other. In this paper, we proposed a novel wavefront-coding-based surface slope metrology technique. Four-dimension information of the optics under test, including x-y position and sagittal/tangential angle, is provided. Due to the focused beam used and the high speed DMD (Digital Mirror Device), high spatial resolution of the measurement is obtained. In experiment, we demonstrated this technique by measuring bend-based high energy monochromator developed in BSRF.
类目[WOS]Optics ; Physics, Applied
关键词[WOS]OPTICS
语种英语
WOS记录号WOS:000387730600005
引用统计
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/260482
专题中国科学院高能物理研究所_多学科研究中心_期刊论文
中国科学院高能物理研究所_粒子天体物理中心
中国科学院高能物理研究所_多学科研究中心
作者单位中国科学院高能物理研究所
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GB/T 7714
Yang FG,Cai Q,Liu P,et al. Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method[J]. 8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS,2016,9687:-.
APA 杨福桂.,蔡泉.,刘鹏.,盛伟繁.,张晓伟.,...&Li, M.(2016).Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method.8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS,9687,-.
MLA 杨福桂,et al."Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method".8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS 9687(2016):-.
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