Gas sensor based on ZnO film/silica pillars
Liu J(刘静); Liang YX(梁亚祥); Yi FT(伊福廷); Wang B(王波); Zhang TC(张天冲); Wang YT(王雨婷); Zhou Y(周悦); Liu, J; Liang, YX; Yi, FT; Wang, B; Zhang, TC; Wang, YT; Zhou, Y
刊名MATERIALS RESEARCH EXPRESS
2016
卷号3期号:12
关键词substrate gas sensor zinc oxide magnetron sputtering pillar
DOI10.1088/2053-1591/3/12/125701
文章类型期刊论文
英文摘要Silica submicron pillars are used as substrate for Zinc oxide (ZnO) gas sensor for the first time. The submicron pillars with the large surface ratio can improve the gas sensing performance obviously. Silicon pillars are fabricated by cesium chloride (CsCl) self-assembly lithography and inductively coupled plasma dry etching as substrate, the ZnO film is deposited on the pillars surface by RF magnetron sputtering. With this method, the pillar based gas sensor has the higher gas response, the shorter response and recovery time than the planar one with different working temperatures, different gas concentrations. 300 degrees C is the best working temperature, for planar gas sensor, the gas response is 22.81 for 1520 ppm ethanol, the response time is 55 s and the recovery time is 169 s. While for the pillar based one, the gas response is 28.20, the response time is 51 s and the recovery time is 92 s.
类目[WOS]Materials Science, Multidisciplinary
关键词[WOS]ULTRAVIOLET-LASER EMISSION ; ROOM-TEMPERATURE ; NANOROD ARRAYS ; THIN-FILMS ; FABRICATION ; UV ; SUBSTRATE
语种英语
WOS记录号WOS:000391542100001
引用统计
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/260454
专题中国科学院高能物理研究所_多学科研究中心_期刊论文
中国科学院高能物理研究所_多学科研究中心
作者单位中国科学院高能物理研究所
推荐引用方式
GB/T 7714
Liu J,Liang YX,Yi FT,et al. Gas sensor based on ZnO film/silica pillars[J]. MATERIALS RESEARCH EXPRESS,2016,3(12).
APA 刘静.,梁亚祥.,伊福廷.,王波.,张天冲.,...&Zhou, Y.(2016).Gas sensor based on ZnO film/silica pillars.MATERIALS RESEARCH EXPRESS,3(12).
MLA 刘静,et al."Gas sensor based on ZnO film/silica pillars".MATERIALS RESEARCH EXPRESS 3.12(2016).
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