Current status and trends of stitching interferometry in synchrotron radiation field
Liu DX(刘丁枭); Sheng WF(盛伟繁); Wang QS(王秋实); Li M(李明)
刊名Optics and Precision Engineering
2016
卷号24期号:10页码:2357-2369-
DOI10.3788/OPE.20162410.2357
其他题名拼接干涉技术在同步辐射领域的发展现状及趋势
通讯作者盛伟繁
文章类型期刊论文
英文摘要In synchrotron radiation field, the apertures of optical components increase gradually and their surface figure precisions have been demanded to be a nano-radian level. This paper researches the modern surface figure measurement methods in this field, stitching interferometry, to realize the high resolution two-dimensional measurement of optical components. The basic principles of the stitching interferometry are introduced. Then, a series of common optical surface shape measurement instruments in the synchrotron radiation field are overviewed, such as long trace profilers based on laser beams, high precision and auto-collimation measuring machines for nanometer optical components and stitching interferometers. It describes their development history and working characteristics and compares their shortcomings and advantages. Finally, this paper analyzes the main error sources involved in the stitching interferometry, and points out that the application and development trends of the technology are mainly the innovation of the stitching algorithm, the improvement of measuring speeds of interferometers, the commercialization of interferometers and the integration of the interferometry and other science technologies. 漏 2016, Science Press. All right reserved.
语种中文
引用统计
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/260354
专题中国科学院高能物理研究所_多学科研究中心_期刊论文
中国科学院高能物理研究所_粒子天体物理中心
中国科学院高能物理研究所_多学科研究中心
作者单位中国科学院高能物理研究所
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Liu DX,Sheng WF,Wang QS,et al. Current status and trends of stitching interferometry in synchrotron radiation field[J]. Optics and Precision Engineering,2016,24(10):2357-2369-.
APA 刘丁枭,盛伟繁,王秋实,&李明.(2016).Current status and trends of stitching interferometry in synchrotron radiation field.Optics and Precision Engineering,24(10),2357-2369-.
MLA 刘丁枭,et al."Current status and trends of stitching interferometry in synchrotron radiation field".Optics and Precision Engineering 24.10(2016):2357-2369-.
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