IHEP OpenIR  > 多学科研究中心
An algorithm for circular test and improved optical configuration by two-dimensional (2D) laser heterodyne interferometer
Tang SZ(汤善治); Tang, SZ; Han QF(韩庆夫); Li M(李明); Yu, SR; Han, QF; Li, M; Wang, Z
2016
Source PublicationREVIEW OF SCIENTIFIC INSTRUMENTS
ISSN0034-6748
EISSN1089-7623
Volume87Issue:9Pages:95103
Corresponding Author汤善治 ; 李明
SubtypeArticle
AbstractCircular test is an important tactic to assess motion accuracy in many fields especially machine tool and coordinate measuring machine. There are setup errors due to using directly centring of the measuring instrument for both of contact double ball bar and existed non-contact methods. To solve this problem, an algorithm for circular test using function construction based on matrix operation is proposed, which is not only used for the solution of radial deviation (F) but also should be applied to obtain two other evaluation parameters especially circular hysteresis (H). Furthermore, an improved optical configuration with a single laser is presented based on a 2D laser heterodyne interferometer. Compared with the existed non-contact method, it has a more pure homogeneity of the laser sources of 2D displacement sensing for advanced metrology. The algorithm and modeling are both illustrated. And error budget is also achieved. At last, to validate them, test experiments for motion paths are implemented based on a gantry machining center. Contrast test results support the proposal. Published by AIP Publishing.
DOI10.1063/1.4962708
WOS KeywordPLANE MIRROR INTERFEROMETER ; MACHINE-TOOLS ; ERROR ; COMPENSATION
Indexed BySCI
Language英语
WOS SubjectInstruments & Instrumentation ; Physics, Applied
WOS IDWOS:000385634500066
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/260313
Collection多学科研究中心
粒子天体物理中心
Affiliation中国科学院高能物理研究所
Recommended Citation
GB/T 7714
Tang SZ,Tang, SZ,Han QF,et al. An algorithm for circular test and improved optical configuration by two-dimensional (2D) laser heterodyne interferometer[J]. REVIEW OF SCIENTIFIC INSTRUMENTS,2016,87(9):95103.
APA 汤善治.,Tang, SZ.,韩庆夫.,李明.,Yu, SR.,...&Wang, Z.(2016).An algorithm for circular test and improved optical configuration by two-dimensional (2D) laser heterodyne interferometer.REVIEW OF SCIENTIFIC INSTRUMENTS,87(9),95103.
MLA 汤善治,et al."An algorithm for circular test and improved optical configuration by two-dimensional (2D) laser heterodyne interferometer".REVIEW OF SCIENTIFIC INSTRUMENTS 87.9(2016):95103.
Files in This Item:
File Name/Size DocType Version Access License
20160758.pdf(2929KB)期刊论文作者接受稿限制开放CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[汤善治]'s Articles
[Tang, SZ]'s Articles
[韩庆夫]'s Articles
Baidu academic
Similar articles in Baidu academic
[汤善治]'s Articles
[Tang, SZ]'s Articles
[韩庆夫]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[汤善治]'s Articles
[Tang, SZ]'s Articles
[韩庆夫]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.