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An algorithm for circular test and improved optical configuration by two-dimensional (2D) laser heterodyne interferometer
Tang SZ(汤善治); Tang, SZ; Han QF(韩庆夫); Li M(李明); Yu, SR; Han, QF; Li, M; Wang, Z
2016
发表期刊REVIEW OF SCIENTIFIC INSTRUMENTS
卷号87期号:9
通讯作者汤善治 ; 李明
文章类型期刊论文
摘要Circular test is an important tactic to assess motion accuracy in many fields especially machine tool and coordinate measuring machine. There are setup errors due to using directly centring of the measuring instrument for both of contact double ball bar and existed non-contact methods. To solve this problem, an algorithm for circular test using function construction based on matrix operation is proposed, which is not only used for the solution of radial deviation (F) but also should be applied to obtain two other evaluation parameters especially circular hysteresis (H). Furthermore, an improved optical configuration with a single laser is presented based on a 2D laser heterodyne interferometer. Compared with the existed non-contact method, it has a more pure homogeneity of the laser sources of 2D displacement sensing for advanced metrology. The algorithm and modeling are both illustrated. And error budget is also achieved. At last, to validate them, test experiments for motion paths are implemented based on a gantry machining center. Contrast test results support the proposal. Published by AIP Publishing.
DOI10.1063/1.4962708
关键词[WOS]PLANE MIRROR INTERFEROMETER ; MACHINE-TOOLS ; ERROR ; COMPENSATION
语种英语
WOS类目Instruments & Instrumentation ; Physics, Applied
WOS记录号WOS:000385634500066
引用统计
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/260313
专题多学科研究中心
粒子天体物理中心
作者单位中国科学院高能物理研究所
推荐引用方式
GB/T 7714
Tang SZ,Tang, SZ,Han QF,et al. An algorithm for circular test and improved optical configuration by two-dimensional (2D) laser heterodyne interferometer[J]. REVIEW OF SCIENTIFIC INSTRUMENTS,2016,87(9).
APA 汤善治.,Tang, SZ.,韩庆夫.,李明.,Yu, SR.,...&Wang, Z.(2016).An algorithm for circular test and improved optical configuration by two-dimensional (2D) laser heterodyne interferometer.REVIEW OF SCIENTIFIC INSTRUMENTS,87(9).
MLA 汤善治,et al."An algorithm for circular test and improved optical configuration by two-dimensional (2D) laser heterodyne interferometer".REVIEW OF SCIENTIFIC INSTRUMENTS 87.9(2016).
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