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The Silicon Solar Cell with Selective Nanoscrew Pillars Fabricated by Cesium Chloride Self-Assembly Lithography and Dry Etching
Liu J(刘静); Zhang XS(张新帅); Sun GJ(孙钢杰); Wang B(王波); Zhang TC(张天冲); Yi FT(伊福廷); Liu P(刘鹏); Liu, J; Zhang, XS; Sun, GJ; Wang, B; Zhang, TC; Yi, FT; Liu, P
2016
发表期刊JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
卷号16期号:7页码:7515-7520
通讯作者伊福廷
文章类型期刊论文
摘要A kind of nanoscrew pillars is selectively made on the surface of silicon solar cell to improve the solar cell performance. Nanoscrew pillars with rough side wall are fabricated by Cesium Chloride (CsCl) self-assembly lithography and inductively coupled plasma (ICP) dry etching. The nanoscrew pillars have the average diameter of from 200 nm to 1.5 mu m with the screw cycle of 150 nm linearly determined by the etching cycles. Compared with the nanopillars of smooth side wall, the nanoscrew pillars have the better antireflection property for the short wavelength ranging from 300 to 550 nm and better hydrophobicity property with the static similar to 137 degrees contact angle due to the special morphology. For the silicon solar cell covered by nanoscrew pillars on all over the entire front surface, the photovoltaic conversion efficiency (PCE) is not desirable with only 13.34%. For the solar cell covered by nanoscrew pillars only on the active area and metal electrode pattern on plain area, the PCE has been improved to 15.39% with a short circuit current density (J(sc)) of 38.21 mA/cm(2) and an open circuit voltage (V-oc) of 558.0 mV mainly benefiting from the better contacts of metal electrode pattern.
关键词CsCl Selective Nanoscrews Hydrophobicity Silicon Solar Cell
DOI10.1166/jnn.2016.11759
关键词[WOS]NANOWIRE ARRAYS ; ANTIREFLECTION ; SURFACES ; GROWTH
语种英语
WOS类目Chemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
WOS记录号WOS:000387100400128
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/260273
专题多学科研究中心
作者单位中国科学院高能物理研究所
推荐引用方式
GB/T 7714
Liu J,Zhang XS,Sun GJ,et al. The Silicon Solar Cell with Selective Nanoscrew Pillars Fabricated by Cesium Chloride Self-Assembly Lithography and Dry Etching[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2016,16(7):7515-7520.
APA 刘静.,张新帅.,孙钢杰.,王波.,张天冲.,...&Liu, P.(2016).The Silicon Solar Cell with Selective Nanoscrew Pillars Fabricated by Cesium Chloride Self-Assembly Lithography and Dry Etching.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,16(7),7515-7520.
MLA 刘静,et al."The Silicon Solar Cell with Selective Nanoscrew Pillars Fabricated by Cesium Chloride Self-Assembly Lithography and Dry Etching".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 16.7(2016):7515-7520.
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