Fabrication and Field Emission Property of Ordered Silicon Nanotip Array Based on Controllable Self-Assembly of Cesium Chloride
Zhang XS(张新帅); Wang YT(王雨婷); Liu J(刘静); Wang B(王波); Zhang TC(张天冲); Yi FT(伊福廷); Zhang, XS; Wang, YT; Liu, J; Wang, B; Zhang, TC; Yi, FT
刊名JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
2016
卷号16期号:7页码:7715-7719
关键词Self-Assembly Cesium Chloride Ordered Array Dry Etching Silicon Nanotip Field Emission
DOI10.1166/jnn.2016.12708
通讯作者伊福廷
文章类型期刊论文
英文摘要Cesium Chloride (CsCl) is a kind of self-assembly materials. The layer of CsCl deposited on a hydrophilic substrate will reorganize into islands array when exposed to water vapor under controlled conditions. The islands array is generally disordered and the diameters of the islands are random. In this paper, we develop a method which overcomes the randomicity of the process of CsCl self-assembly and makes the process controllable. An ordered array of CsCl islands with determined quantities, diameters and positions is obtained on silicon wafer. Using the ordered CsCl islands array as masks, an ordered array of silicon nanotips is fabricated by inductively coupled plasma (ICP) dry etching. The ordered silicon nanotip array shows an excellent field emission property with a low turn-on field of 7 V/mu m at a current density of 1 mu A/cm(2). The Fowler-Nordheim plot obtained is linearly dependent, indicating the emission current arises from the quantum tunnelling effect. The ordered silicon nanotip array is expected to have important applications in field emission integrated devices.
类目[WOS]Chemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
关键词[WOS]CARBON NANOTUBES ; RESIST
语种英语
WOS记录号WOS:000387100400157
引用统计
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/260248
专题中国科学院高能物理研究所_多学科研究中心_期刊论文
中国科学院高能物理研究所_多学科研究中心
作者单位中国科学院高能物理研究所
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Zhang XS,Wang YT,Liu J,et al. Fabrication and Field Emission Property of Ordered Silicon Nanotip Array Based on Controllable Self-Assembly of Cesium Chloride[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2016,16(7):7715-7719.
APA 张新帅.,王雨婷.,刘静.,王波.,张天冲.,...&Yi, FT.(2016).Fabrication and Field Emission Property of Ordered Silicon Nanotip Array Based on Controllable Self-Assembly of Cesium Chloride.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,16(7),7715-7719.
MLA 张新帅,et al."Fabrication and Field Emission Property of Ordered Silicon Nanotip Array Based on Controllable Self-Assembly of Cesium Chloride".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 16.7(2016):7715-7719.
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