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Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature
Ma, YH; Liu, FZ; Zhu, MF; Liu, JL; Wang, HH; Yang, Y; Li, YF; Wang HH(王焕华)
2009
发表期刊NANOTECHNOLOGY
卷号20期号:27页码:275201
通讯作者[Ma, Yanhong ; Liu, Fengzhen ; Zhu, Meifang ; Liu, Jinlong] Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China ; [Wang, Huan-hua] Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China ; [Yang, Yi ; Li, Yongfang] Chinese Acad Sci, Inst Chem, Beijing 100190, Peoples R China
文章类型Article
摘要Aligned amorphous and crystallized silicon nanorods (SiNRs) were successfully fabricated at low temperatures using radio frequency magnetron sputtering and hot wire chemical vapor deposition with glancing angle incident flux. The influences of the deposition pressure, sputtering power, substrate rotation and hydrogen dilution ratio on the diameter, density, orientation and crystallization of the Si nanorods were systematically investigated. With increasing sputtering power, the density of Si nanorods decreases and the diameter of SiNRs increases. The pressure has the opposite effect on the growth of SiNRs compared with the sputtering power. By combining glancing angle deposition ( GLAD) with the hydrogen diluted silane in hot wire chemical vapor deposition (HWCVD), aligned crystallized Si nanorods with a crystalline volume fraction of 0.55 were achieved under a substrate temperature of 140 degrees C. The Si nanorods have been tested for photovoltaic application.
学科领域Science & Technology - Other Topics; Materials Science; Physics
DOI10.1088/0957-4484/20/27/275201
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语种英语
WOS研究方向Science & Technology - Other Topics ; Materials Science ; Physics
WOS类目Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS记录号WOS:000267089600003
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文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/241056
专题多学科研究中心
作者单位中国科学院高能物理研究所
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GB/T 7714
Ma, YH,Liu, FZ,Zhu, MF,et al. Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature[J]. NANOTECHNOLOGY,2009,20(27):275201.
APA Ma, YH.,Liu, FZ.,Zhu, MF.,Liu, JL.,Wang, HH.,...&王焕华.(2009).Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature.NANOTECHNOLOGY,20(27),275201.
MLA Ma, YH,et al."Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature".NANOTECHNOLOGY 20.27(2009):275201.
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