Nanjing Univ Sci & Technol, Dept Appl Phys, Nanjing 210094, Peoples R China
; Chinese Acad Sci, Inst High Energy Phys, Beijing 100039, Peoples R China
; Univ Hong Kong, Dept Phys, Hong Kong, Hong Kong, Peoples R China
Article; Proceedings Paper
La0.7Ca0.3MnO3(LCMO) thin films with the thickness of 50 nm were deposited on (001)-oriented single crystal SrTiO3(STO), MgO and alpha-Al2O3(ALO) by 90 degrees off-axis radio frequency magnetron sputtering. Grazing incidence X-ray diffraction technique, associated with normal X-ray diffraction, was performed to measure the in-plane lattice parameter and investigate the lattice strain and strain relaxation in LCMO films. The results indicated that critical thickness of strain relaxation is very small, which may be related to large mismatch between film and substrate. The mechanism for strain relaxation in LCMO film is perhaps different from that for tetragonal distortion.