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The microstructure of hydrogenated microcrystalline silicon thin films studied by small-angle x-ray scattering
Zhou, BQ; Liu, FZ; Zhu, MF; Gu, JH; Zhou, YQ; Liu, JL; Dong, BZ; Li, GH; Ding, K; Dong BZ(董宝中)
2005
发表期刊ACTA PHYSICA SINICA
卷号54期号:5页码:2172-2175
通讯作者Chinese Acad Sci, Grad Sch, Dept Phys, Beijing 100039, Peoples R China ; Inner Mongolia Normal Univ, Dept Phys, Hohhot 010022, Peoples R China ; Chinese Acad Sci, Inst High Energy Phys, Beijing Synchrotron Radiat Lab, Beijing 100039, Peoples R China ; Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
文章类型Article
摘要The microstructures of hydrogenated microcrystalline silicon (tic-Si: H) thin films, prepared by plasma-enhanced chemical vapor deposition (PECVD), hot wire CVD(HWCVD) and plasma assisted HWCVD (PE-HWCVD), have been analyzed by the small angle x-ray scattering(SAXS) measurement. The SAXS data show that the microstructures of the μ c-Si: H films display different characteristics for different deposition techniques. For films deposited by PECVD, the volume fraction of micro-voids and mean size are smaller than those in HWCVD sample. Aided by suitable ion-bombardment, PE-HWCVD samples show a more compact structure than the HWCVD sample. The microstructure parameters of the μ c-Si: H thin films deposited by two-steps HWCVD and PE-HWCVD with Ar ions are evidently improved. The result of 45° tilting SAXS measurement indicates that the distribution of micro-voids in the film is anisotropic. The Fouriertransform infrared spectra confirm the SAXS data.
关键词hydrogenated microcrystalline silicon thin film microstructure micro-voids small-angle x-ray scattering
学科领域Physics
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语种英语
WOS研究方向Physics
WOS类目Physics, Multidisciplinary
WOS记录号WOS:000229049900038
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被引频次:2[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/239673
专题多学科研究中心
作者单位中国科学院高能物理研究所
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Zhou, BQ,Liu, FZ,Zhu, MF,et al. The microstructure of hydrogenated microcrystalline silicon thin films studied by small-angle x-ray scattering[J]. ACTA PHYSICA SINICA,2005,54(5):2172-2175.
APA Zhou, BQ.,Liu, FZ.,Zhu, MF.,Gu, JH.,Zhou, YQ.,...&董宝中.(2005).The microstructure of hydrogenated microcrystalline silicon thin films studied by small-angle x-ray scattering.ACTA PHYSICA SINICA,54(5),2172-2175.
MLA Zhou, BQ,et al."The microstructure of hydrogenated microcrystalline silicon thin films studied by small-angle x-ray scattering".ACTA PHYSICA SINICA 54.5(2005):2172-2175.
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