Tongji Univ, Inst Precis Opt Engn, Dept Phys, Shanghai 200092, Peoples R China
; Univ Sci & Technol China, Natl Synchrotron Radiat Lab, Hefei 230029, Peoples R China
; Inst High Energy Phys, Beijing 100039, Peoples R China
The soft X-ray interferometry is completed by the Mach-Zehnder interferometer using a soft X-ray laser, and it is also an important method to measure the electron densities of a laser-produced plasma near the critical surface. It is apparently demonstrated in this paper that the incident angle of each optical element in the soft X-ray Mach-Zehnder interferometer should be near normal incidence based on the polarized characteristics of the soft X-ray multilayers, and the product of reflectivity and transmission of the beam splitter should be taken as a standard of design according to the structure of the soft X-ray Mach-Zehnder interferometer. The beam splitters used in the soft X-ray interferometry at 13.9 nm are fabricated using the ion beam sputtering. The figure error of the beam splitter has reached the nanometer magnitude, in which the product of reflectivity and transmission of the beam splitter is more than 1.6%.