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Control of deposition channels in nanosphere templates for high-density nanodot array production
Wu, PW; Peng LQ(彭良强); Peng, LQ; Tuo, XL; Wang, XG; Yuan, J
2005
发表期刊NANOTECHNOLOGY
卷号16期号:9页码:1693-1696
通讯作者Tsing Hua Univ, Sch Mat Sci & Engn, Electron Microscope Lab, Beijing 100084, Peoples R China ; Chinese Acad Sci, Inst High Energy Phys, Beijing 100039, Peoples R China ; Tsing Hua Univ, Sch Mat Sci & Engn, Dept Chem Engn, Beijing, Peoples R China
摘要The deformation of 'soft' polystyrene spheres is found to limit the usefulness of nanosphere lithography in high-density applications because of the eventual closure of the void areas between the self-assembled nanospheres which function as channels for material deposition. We have used a plasma etching technique to reopen and enlarge these channels in the template in a controlled manner. This enables the controlled fabrication of a range of nanoarrays of very high density and variable sizes. The resulting shape of the nanodots produced can be understood by considering the etching-induced surface diffusion of the polystyrene in the plasma treatment.
文章类型Article
学科领域Science & Technology - Other Topics; Materials Science; Physics
研究领域[WOS]Science & Technology - Other Topics ; Materials Science ; Physics
DOI10.1088/0957-4484/16/9/047
URL查看原文
语种英语
WOS类目Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS记录号WOS:000232089500047
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被引频次:18[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/239481
专题多学科研究中心
作者单位中国科学院高能物理研究所
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GB/T 7714
Wu, PW,Peng LQ,Peng, LQ,et al. Control of deposition channels in nanosphere templates for high-density nanodot array production[J]. NANOTECHNOLOGY,2005,16(9):1693-1696.
APA Wu, PW,彭良强,Peng, LQ,Tuo, XL,Wang, XG,&Yuan, J.(2005).Control of deposition channels in nanosphere templates for high-density nanodot array production.NANOTECHNOLOGY,16(9),1693-1696.
MLA Wu, PW,et al."Control of deposition channels in nanosphere templates for high-density nanodot array production".NANOTECHNOLOGY 16.9(2005):1693-1696.
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