ACAD SINICA,INST HIGH ENERGY PHYS,BEIJING 100039,PEOPLES R CHINA
; UNIV SCI & TECHNOL CHINA,HEFEI 230026,PEOPLES R CHINA
Multilayer phase gratings have higher diffraction efficiency than amplitude gratings in the soft x-ray region. The authors give a detailed description of the fabrication, characterization, and performance of soft x-ray phase modulation multilayer laminar gratings. The experimental results are discussed and compared with theory.