Xinjiang Univ, Dept Phys, Urumqi 830046, Peoples R China
; Chinese Acad Sci, Xinjiang Inst Phys, Urumqi 830011, Peoples R China
; Chinese Acad Sci, Inst High Energy Phys, Beijing 100039, Peoples R China
Changes of surface electronic states of InP under 1 keV X-ray irradiation is studied by X-ray photoelectron spectroscopy (XPS) and ultraviolet ray energy spectroscopy (UPS). Our results show that the soft X-ray irradiation has little effect on In atoms but much on P atoms. We analysed the mechanism of irradiation and explained the major effect.