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In-situ monitoring of EuTiO3 and SrTiO3 film growth using time-resolved X-ray scattering during pulsed-laser deposition
Wang HH(王焕华); Wang, HH
2009
发表期刊CHINESE PHYSICS C
卷号33期号:11页码:935-943
通讯作者Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China
文章类型Article
摘要Time-resolved X-ray scattering was employed to in-situ monitor the epitaxial growth process of the thin films and multilayers of EuTiO3 and SrTiO3 during pulsed laser deposition. The temporal intensity oscillations of the reflected X-rays at anti-Bragg position and the transient processes following the flux pulses were observed. The temporal intensity oscillations were used to control the film thickness, and the reflectivity along the crystal truncation rod was used to measure both the film thickness and the surface/interface roughness. The primary features of the X-ray intensity oscillations were reproduced via simulating the experimental data using diffusive rate equation model. Several mechanisms of determining the X-ray intensity features were discerned.
关键词time-resolved X-ray scattering PLD EuTiO3 SrTiO3 thin film multilayer
学科领域Physics
研究领域[WOS]Physics ; Physics
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语种英语
研究领域[WOS]Physics ; Physics
WOS类目Physics, Nuclear ; Physics, Particles & Fields
WOS记录号WOS:000271893700001
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文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/238770
专题多学科研究中心
作者单位中国科学院高能物理研究所
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Wang HH,Wang, HH. In-situ monitoring of EuTiO3 and SrTiO3 film growth using time-resolved X-ray scattering during pulsed-laser deposition[J]. CHINESE PHYSICS C,2009,33(11):935-943.
APA 王焕华,&Wang, HH.(2009).In-situ monitoring of EuTiO3 and SrTiO3 film growth using time-resolved X-ray scattering during pulsed-laser deposition.CHINESE PHYSICS C,33(11),935-943.
MLA 王焕华,et al."In-situ monitoring of EuTiO3 and SrTiO3 film growth using time-resolved X-ray scattering during pulsed-laser deposition".CHINESE PHYSICS C 33.11(2009):935-943.
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