Structure fabrication of PI film for GEM detector
Yi FT(伊福廷); Luo L(罗亮); Zhang JF(张菊芳); Chen YB(陈元柏); Xie YG(谢一冈); Xie W(谢万); Yi, FT; Luo, L; Zhang, JF; Chen, YB; Xie, YG; Xie, W
刊名HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION
2007
卷号31期号:10页码:929-932
关键词GEM film gas electron multiplier (GEM) particle detector X-ray detector
学科分类Physics
通讯作者Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China ; Grad Univ Chinese Acad Sci, Beijing 100049, Peoples R China
文章类型Article
英文摘要GEM, which has rapidly been developed in recent years as a new type of gas detector, has advantages of high position resolution and counting rate with a wide potential application in particle physics and X-ray imaging and etc. One of the key techniques of GEM's development is the structure fabrication of the PI film for the detector, which is difficult to be done by the lithography process. In this paper we present the structure fabrication process of GEM's PI film, and the result of our work about it. We chose wet-etching and dry-etching to make the. structure holes of PI film, and find that wet-etching is better way to get perfect holes of GEM's PI film for future application with acceptable price. The successful fabrication of GEM's film structures is helpful to develop the domestic research of GEM detector. The performance of the GEM detector with such PI film still need more detail study.
类目[WOS]Physics, Nuclear ; Physics, Particles & Fields
研究领域[WOS]Physics
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语种英语
WOS记录号WOS:000249975800006
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被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/238760
专题中国科学院高能物理研究所_多学科研究中心_期刊论文
中国科学院高能物理研究所_实验物理中心
中国科学院高能物理研究所_多学科研究中心
作者单位中国科学院高能物理研究所
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Yi FT,Luo L,Zhang JF,et al. Structure fabrication of PI film for GEM detector[J]. HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,2007,31(10):929-932.
APA 伊福廷.,罗亮.,张菊芳.,陈元柏.,谢一冈.,...&Xie, W.(2007).Structure fabrication of PI film for GEM detector.HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,31(10),929-932.
MLA 伊福廷,et al."Structure fabrication of PI film for GEM detector".HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION 31.10(2007):929-932.
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