UNIV SCI & TECHNOL CHINA,HEFEI 230026,PEOPLES R CHINA
; ACAD SINICA,INST HIGH ENERGY PHYS,BEIJING 100039,PEOPLES R CHINA
The fabrication and characterization of soft X-ray multilayer laminar phase gratings are described in this paper. The measurement of the optical performance of soft X-ray multilayer phase gratings at the Beijing Synchrotron Radiation Facility is described in detail. The measurement results are analyzed and compared with theoretical predictions.