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Study of semiconductor super thin heterostructures with synchrotron radiation X-ray standing wave technique
Alternative TitleX射线驻波方法研究半导体超薄异质外延层
Jiang XM(姜晓明); Jia QJ(贾全杰); Hu TD(胡天斗); Huang YY(黄宇营); Zheng WL(郑文莉); He W(何伟); Xian DC(冼鼎昌); Jiang, XM; Jia, QJ; Hu, TD; Huang, YY; Zheng, WL; He, W; Xian, DC; Shi, B; Jiang, ZM; Wang, X
2001
Source PublicationHIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION
Volume25Issue:6Pages:588-594
Corresponding AuthorChinese Acad Sci, Inst High Energy Phys, Beijing 100039, Peoples R China ; Fudan Univ, Surface Phys Natl Key Lab, Shanghai 200433, Peoples R China
SubtypeArticle
AbstractThe X-ray standing wave experiment method is established with the double-crystal monochromator and precision 2-circle goniometer at Beijing Synchrotron Radiation Facility. It is used combined with the X-ray diffraction, to investigate the heterostructure of super thin Ge atomic layer within Si crystals. The results show that the GexSi1-x alloy layer with average x = 0.13 was formed in the Si crystal sample due to the segregation of Ge atoms during the preparation. Due to the diffusion of Ge atoms to the crystal surface, the GexSi1-x alloy layer was disappeared and nearly pure C;e layer was formed on the Si crystal surface after annealing at 650 degreesC.
KeywordX-ray standing wave heterostructure segregation atomic position
Subject AreaPhysics
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Language英语
WOS Research AreaPhysics
WOS SubjectPhysics, Nuclear ; Physics, Particles & Fields
WOS IDWOS:000169307600019
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Document Type期刊论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/238042
Collection院士
中国科学院高能物理研究所_人力资源处
中国科学院高能物理研究所_中国散裂中子源
Affiliation中国科学院高能物理研究所
First Author AffilicationInstitute of High Energy
Recommended Citation
GB/T 7714
Jiang XM,Jia QJ,Hu TD,et al. Study of semiconductor super thin heterostructures with synchrotron radiation X-ray standing wave technique[J]. HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,2001,25(6):588-594.
APA 姜晓明.,贾全杰.,胡天斗.,黄宇营.,郑文莉.,...&Wang, X.(2001).Study of semiconductor super thin heterostructures with synchrotron radiation X-ray standing wave technique.HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,25(6),588-594.
MLA 姜晓明,et al."Study of semiconductor super thin heterostructures with synchrotron radiation X-ray standing wave technique".HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION 25.6(2001):588-594.
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