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3B1 BEAM LINE AND ITS PHYSICAL-PROPERTIES
Yi FT(伊福廷); Wang PW(王培伟); Jin M(晋明); Wu JW(吴坚武); YI, FT; WANG, PW; JIN, M; WU, JW
1995
发表期刊NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
卷号359期号:1-2页码:396-397
通讯作者INST HIGH ENERGY PHYS,SYNCHROTRON RADIAT LAB,BEIJING 100039,PEOPLES R CHINA
摘要The 3B1 beam line is in the hall of 13# on BSRF, and is used for the lithography, biology and multilayer reflection research. On the line, there are a cylinder mirror system, a vacuum control system, an exposure chamber and a beryllium window for lithography research. The mirror coated with gold receives the synchrotron radiation at a glance angle of 1.5 degrees, and scans in the vertical for lithography. The light, reflected by the scanning mirror and absorbed by the window, produces a spectrum of 4-20 Angstrom and a uniformity spot for the lithography.
文章类型Article; Proceedings Paper
学科领域Instruments & Instrumentation; Nuclear Science & Technology; Physics; Spectroscopy
研究领域[WOS]Instruments & Instrumentation ; Nuclear Science & Technology ; Physics ; Spectroscopy
DOI10.1016/0168-9002(94)01684-4
URL查看原文
语种英语
WOS类目Instruments & Instrumentation ; Nuclear Science & Technology ; Physics, Particles & Fields ; Spectroscopy
WOS记录号WOS:A1995QY84500101
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被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/237312
专题多学科研究中心
作者单位中国科学院高能物理研究所
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Yi FT,Wang PW,Jin M,et al. 3B1 BEAM LINE AND ITS PHYSICAL-PROPERTIES[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT,1995,359(1-2):396-397.
APA 伊福廷.,王培伟.,晋明.,吴坚武.,YI, FT.,...&WU, JW.(1995).3B1 BEAM LINE AND ITS PHYSICAL-PROPERTIES.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT,359(1-2),396-397.
MLA 伊福廷,et al."3B1 BEAM LINE AND ITS PHYSICAL-PROPERTIES".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT 359.1-2(1995):396-397.
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