Microfabrication of folded waveguide using UV-LIGA for 220 GHz traveling wave tube
Ma; Tianjun; Sun; Jianhai; Hao; Baoliang; Li; Fei; Yi; Futing; Liu; Pukun; Yi FT(伊福廷)
刊名HIGH POWER LASER AND PARTICLE BEAMS
2015
卷号27期号:2页码:24101
关键词Fabrication tolerances Folded waveguides Micro-fabrication techniques Operating frequency Polymer monofilaments Process parameters UV LIGA Vacuum electron devices
DOI10.11884/HPLPB201527.024101
其他题名220GHz折叠波导UV-LIGA微加工工艺(英文)
文章类型Article
英文摘要Folded waveguide slow-wave structure as a traveling wave tube's main component is becoming smaller and smaller with vacuum electron devices operating frequency rises towards THz. And the fabrication tolerances are becoming increasingly critical. Traditional methods don't adapt to these micro-scale ranges. UV-LIGA is an attractive technique for fabricating this structure. This paper focuses on microfabrication techniques using SU8 photoresists to create this circuit at 220 GHz and a special mould made by PDMS and embedded polymer monofilament to assure the thickness and shape of the beam tunnel. By optimizing the process parameters, using gravity-assisted deposition technique, SU8 mold with coincident thickness and smooth surface is realized. After electroforming in a bath composed with sulfuric acid and copper sulfate and drawing out polymer monofilament, the microstructure is fabricated. ©, 2015, Editorial Office of High Power Laser and Particle Beams. All right reserved.
类目[WOS]604 Metal Cutting and Machining ; 616.1 Heat Exchange Equipment and Components ; 711 Electromagnetic Waves ; 714 Electronic Components and Tubes ; 801 Chemistry ; 816.2 Plants and Machinery for Plastics and Other Polymers
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文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/228925
专题中国科学院高能物理研究所_多学科研究中心_期刊论文
中国科学院高能物理研究所_多学科研究中心
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Ma,Tianjun,Sun,et al. Microfabrication of folded waveguide using UV-LIGA for 220 GHz traveling wave tube[J]. HIGH POWER LASER AND PARTICLE BEAMS,2015,27(2):24101.
APA Ma.,Tianjun.,Sun.,Jianhai.,Hao.,...&伊福廷.(2015).Microfabrication of folded waveguide using UV-LIGA for 220 GHz traveling wave tube.HIGH POWER LASER AND PARTICLE BEAMS,27(2),24101.
MLA Ma,et al."Microfabrication of folded waveguide using UV-LIGA for 220 GHz traveling wave tube".HIGH POWER LASER AND PARTICLE BEAMS 27.2(2015):24101.
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