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Periodic Co/C, Cr/C, and CoCr/C soft X-ray multilayers prepared by N reactive sputtering
Wen; Mingwu; Jiang; Li; Zhang; Zhong; Huang; Qiushi; Wang; Zhanshan; Wang; Hongchang; Cui; Mingqi; Yi; Rongqing; Cui MQ(崔明启)
Source PublicationProceedings of SPIE
SubtypeProceedings Paper
AbstractLightweight Asymmetry and Magnetism Probe project (LAMP) was proposed in China to observe the polarized radiation around 250 eV emitted by soft X-ray celestial sources, like puslars, active galactic, black hole binaries, etc. To produce the high efficiency soft X-ray polarizer for LAMP, we are developing Co/C, Cr/C, CoCr/C X-ray multilayers using magnetron sputtering and reactive sputtering with nitrogen. Hard X-ray grazing incidence reflectometry (GIXR) and soft X-ray reflectance measurements were used to study the interface and microstructure of different multilayers. In comparison to the multilayers deposited by normal magnetron sputtering, reactively-sputtered multilayers show higher reflectivity around 250 eV and lower interfacial roughness. As a result, Co/C, Cr/C, CoCr/C multilayers with smaller period can be made with respect to the multilayer fabricated using non-reactive sputtering. The X-ray performance of reactive sputtered Co/C and CoCr/C multilayers can be further improved by optimizing the deposition process.
KeywordSoft X-ray Polarization Cr/C multilayer Co/C multilayer CoCr/C multilayer Nitridation
Subject AreaEngineering; Optics; Physics
Indexed ByEI ; ADS ; CPCI
WOS Research AreaEngineering ; Optics ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Optics ; Physics, Applied
WOS IDWOS:000356859800027
ADS Bibcode2015SPIE.9510E..0XW
ADS URLhttps://ui.adsabs.harvard.edu/abs/2015SPIE.9510E..0XW
ADS CITATIONShttps://ui.adsabs.harvard.edu/abs/2015SPIE.9510E..0XW/citations
Citation statistics
Cited Times:1 [ADS]
Document Type期刊论文
Recommended Citation
GB/T 7714
Wen,Mingwu,Jiang,et al. Periodic Co/C, Cr/C, and CoCr/C soft X-ray multilayers prepared by N reactive sputtering[J]. Proceedings of SPIE,2015,9510:95100X.
APA Wen.,Mingwu.,Jiang.,Li.,Zhang.,...&崔明启.(2015).Periodic Co/C, Cr/C, and CoCr/C soft X-ray multilayers prepared by N reactive sputtering.Proceedings of SPIE,9510,95100X.
MLA Wen,et al."Periodic Co/C, Cr/C, and CoCr/C soft X-ray multilayers prepared by N reactive sputtering".Proceedings of SPIE 9510(2015):95100X.
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