Fabrication of inverted pyramid structure by Cesium Chloride self-assembly lithography for silicon solar cell.
Liu J(刘静); Zhang XS(张新帅); Sun GJ(孙钢杰); Wang YT(王雨婷); Wang B(王波); Zhang TC(张天冲); Yi FT(伊福廷); 刘鹏(多); Liu; Jing; Zhang; Xinshuai; Sun; Gangjie; Wang; Bo; Zhang; Tianchong; Yi; Futing; Liu; Peng.
刊名Materials Science in Semiconductor Processing
2015
卷号40页码:44-49
关键词Fabrication CsCl self-assembly Inverted pyramid Silicon solar cell
学科分类Engineering; Materials Science; Physics
DOI10.1016/j.mssp.2015.05.048
通讯作者伊福廷
文章类型Article
英文摘要Inverted pyramids were fabricated through a method combining cesium chloride (CsCl) self-assembly technology and anisotropy corrosion of silicon solar cells. Ti film with nanoporous masks was formed by lift-off the CsCl nanoislands for the inverted pyramids. The pyramids were then formed by anisotropy corrosion of alkaline solution. The average diameter and morphology of the pyramids were controlled by varying the average diameter of CsCl nanoislands from 400 nm to 1.5 mu m and by varying the etching time of alkaline solution from 2 to 8 min. The inverted-pyramid texture could suppress reflection to below 10% at wavelengths from 400 to 1000 nm, which was much lower than that of planar wafer. A solar cell fabricated from the pyramids had higher short-circuit current density (J(sc)) and photovoltaic conversion efficiency (PCE) compared with those of planar solar cells for the good antireflection property. The solar cell showed a PCE of 15.25%, a J(sc) of 38.35 mA/cm(2), and an open-circuit voltage of 555.7 mV. (C) 2015 Elsevier Ltd. All rights reserved.
类目[WOS]Engineering, Electrical & Electronic ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
收录类别SCI ; EI ; CA
WOS记录号WOS:000363344600006
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被引频次:5[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/228871
专题中国科学院高能物理研究所_多学科研究中心_期刊论文
中国科学院高能物理研究所_多学科研究中心
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Liu J,Zhang XS,Sun GJ,et al. Fabrication of inverted pyramid structure by Cesium Chloride self-assembly lithography for silicon solar cell.[J]. Materials Science in Semiconductor Processing,2015,40:44-49.
APA 刘静.,张新帅.,孙钢杰.,王雨婷.,王波.,...&Peng..(2015).Fabrication of inverted pyramid structure by Cesium Chloride self-assembly lithography for silicon solar cell..Materials Science in Semiconductor Processing,40,44-49.
MLA 刘静,et al."Fabrication of inverted pyramid structure by Cesium Chloride self-assembly lithography for silicon solar cell.".Materials Science in Semiconductor Processing 40(2015):44-49.
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