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Approaching sub-50 nanoradian measurements by reducing the saw-tooth deviation of the autocollimator in the Nano-Optic-Measuring Machine
Qian, SN; Geckeler, RD; Just, A; Idir, M; Wu, XH; Wu XH(吴雪卉)
2015
发表期刊NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
卷号785页码:206-212
摘要Since the development of the Nano-Optic-Measuring Machine (NOM), the accuracy of measuring the profile of an optical surface has been enhanced to the 100-nrad rms level or better. However, to update the accuracy of the NOM system to sub-50 mad rms, the large saw-tooth deviation (269 nrad rms) of an existing electronic autocollimator, the Elcomat 3000/8, must be resolved. We carried out simulations to assess the saw-tooth-like deviation. We developed a method for setting readings to reduce the deviation to sub-50 nrad rms, suitable for testing plane mirrors. With this method, we found that all the tests conducted in a slowly rising section of the saw-tooth show a small deviation of 28.8 to <40 nrad rms. We also developed a dense-measurement method and an integer-period method to lower the saw-tooth deviation during tests of sphere mirrors. Further research is necessary for formulating a precise test for a spherical mirror. We present a series of test results from our experiments that verify the value of the improvements we made. (C) 2015 The Authors. Published by Elsevier B.V.
文章类型Article
关键词Nano-accuracy metrology Optical surface measurements Figure Synchrotron radiation
学科领域Instruments & Instrumentation; Nuclear Science & Technology; Physics; Spectroscopy
DOI10.1016/j.nima.2015.02.065
收录类别SCI ; EI
WOS类目Instruments & Instrumentation ; Nuclear Science & Technology ; Physics, Particles & Fields ; Spectroscopy
WOS记录号WOS:000352815400032
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被引频次:14[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/228324
专题多学科研究中心
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Qian, SN,Geckeler, RD,Just, A,et al. Approaching sub-50 nanoradian measurements by reducing the saw-tooth deviation of the autocollimator in the Nano-Optic-Measuring Machine[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT,2015,785:206-212.
APA Qian, SN,Geckeler, RD,Just, A,Idir, M,Wu, XH,&吴雪卉.(2015).Approaching sub-50 nanoradian measurements by reducing the saw-tooth deviation of the autocollimator in the Nano-Optic-Measuring Machine.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT,785,206-212.
MLA Qian, SN,et al."Approaching sub-50 nanoradian measurements by reducing the saw-tooth deviation of the autocollimator in the Nano-Optic-Measuring Machine".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT 785(2015):206-212.
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