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EFFECTS OF SECONDARY INTERACTIONS ON THIN-FILM THICKNESS MEASUREMENTS USING XRF
Fan QM(范钦敏); FAN, QM
1991
发表期刊NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
卷号58期号:2页码:#REF!
通讯作者FAN, QM (reprint author), INST HIGH ENERGY PHYS,BEIJING 100080,PEOPLES R CHINA.
摘要The effects of secondary interactions induced by the substrate or a second film on thin film thickness measurements by X-ray fluorescence are described for both single-layer-film-substrate and double-layer-film-substrate systems.
文章类型Letter
学科领域Instruments & Instrumentation; Nuclear Science & Technology; Physics
DOI10.1016/0168-583X(91)95604-C
收录类别SCI
WOS类目Instruments & Instrumentation ; Nuclear Science & Technology ; Physics, Atomic, Molecular & Chemical ; Physics, Nuclear
WOS记录号WOS:A1991FW56200029
引用统计
被引频次:2[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/227424
专题多学科研究中心
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GB/T 7714
Fan QM,FAN, QM. EFFECTS OF SECONDARY INTERACTIONS ON THIN-FILM THICKNESS MEASUREMENTS USING XRF[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1991,58(2):#REF!.
APA 范钦敏,&FAN, QM.(1991).EFFECTS OF SECONDARY INTERACTIONS ON THIN-FILM THICKNESS MEASUREMENTS USING XRF.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,58(2),#REF!.
MLA 范钦敏,et al."EFFECTS OF SECONDARY INTERACTIONS ON THIN-FILM THICKNESS MEASUREMENTS USING XRF".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 58.2(1991):#REF!.
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