IHEP OpenIR  > 多学科研究中心
The structural properties of B-O codoped diamond films
Hu, XJ; Shen, YG; Hao XP(郝小鹏); Wang BY(王宝义); Hao, XP; Wang, BY
2009
发表期刊DIAMOND AND RELATED MATERIALS
卷号18期号:2-3页码:#REF!
通讯作者Hu, XJ (reprint author), Zhejiang Univ Technol, Coll Chem Engn & Mat Sci, Hangzhou, Zhejiang, Peoples R China.
摘要Using Raman spectroscopy and positron annihilation technology (PAT). we investigate the structural properties of the codoped samples by implanting boron and oxygen ions into the intrinsic diamond films (called BO series) and by implanting oxygen ions into the diamond films doped with small amounts of boron in chemical vapor deposition (called CVDBO series). It is found that after 1000 degrees C annealing, the full width at half maximum (FWHM) value of diamond peak in Raman spectrum reduces, the amount of diamond increases above 99.6% and the stress changes from compression to tension. More important the FWHM value in CVDBO series decreases by 1.6 cm(-1) after 1000 degrees C annealing, which is larger than that in the BO series with a decrease of 0.2 cm(-1), showing that the annealing prefers to more significantly reduce the defect concentration in CVDBO series. Also, the PAT measurements indicate that the S(n) value of CVDBO series is smaller than that of BO series after 800 degrees C annealing, suggesting that CVDBO series has lower defect concentrations. It is revealed that the co-doping that implanting oxygen ions into the low concentration B-doped diamond films can give a better restoration of the damaged diamond lattice by oxygen ion implantation after high temperature annealing. The intrinsic mechanism is also discussed. (C) 2008 Elsevier B.V. All rights reserved.
文章类型Article; Proceedings Paper
关键词Diamond film n-type doping Ion implantation Structural properties
学科领域Materials Science
DOI10.1016/j.diamond.2008.07.009
收录类别SCI
WOS类目Materials Science, Multidisciplinary
WOS记录号WOS:000264429300025
引用统计
被引频次:4[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/226967
专题多学科研究中心
推荐引用方式
GB/T 7714
Hu, XJ,Shen, YG,Hao XP,et al. The structural properties of B-O codoped diamond films[J]. DIAMOND AND RELATED MATERIALS,2009,18(2-3):#REF!.
APA Hu, XJ,Shen, YG,郝小鹏,王宝义,Hao, XP,&Wang, BY.(2009).The structural properties of B-O codoped diamond films.DIAMOND AND RELATED MATERIALS,18(2-3),#REF!.
MLA Hu, XJ,et al."The structural properties of B-O codoped diamond films".DIAMOND AND RELATED MATERIALS 18.2-3(2009):#REF!.
条目包含的文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
2275.pdf(316KB)期刊论文作者接受稿开放获取CC BY-NC-SA浏览 请求全文
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Hu, XJ]的文章
[Shen, YG]的文章
[郝小鹏]的文章
百度学术
百度学术中相似的文章
[Hu, XJ]的文章
[Shen, YG]的文章
[郝小鹏]的文章
必应学术
必应学术中相似的文章
[Hu, XJ]的文章
[Shen, YG]的文章
[郝小鹏]的文章
相关权益政策
暂无数据
收藏/分享
文件名: 2275.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。