IHEP OpenIR  > 院士
A new sacrificial layer method of LIGA technology to fabricate movable part of a gripper
Yi FT(伊福廷); Tang ES(唐鄂生); Zhang J(张静); Xian DC(冼鼎昌); Yi, F; Tang, E; Zhang, J; Xian, D
2000
发表期刊MICROSYSTEM TECHNOLOGIES
卷号6期号:4页码:#REF!
通讯作者Yi, F (reprint author), Inst High Energy Phys, BSRF, Beijing 100039, Peoples R China.
文章类型Article
摘要Movable microstructures are required for many applications in accelerator sensors, microvalves, micromotors, grippers and so on. With the LIGA technique, movable components can be fabricated directly by using sacrificial layer technology. This is considerably extended by the application of the LIGA technique. Normally thin metallic layers are sputtered onto an insulating substrate (e.g. silicon wafer or ceramic) and patterned by conventional photolithography and wet etching. They are used as a metalized layer and a sacrificial layer. The movable parts of the microstructures are positioned on the surface of the sacrificial layer, whereas the fixed parts are placed on the metalized area of the substrate. After stripping the resist and the sacrificial layer, the movable parts on the sacrificial layer are finished and the fixed parts remain firmly on the metalized layer. This process is rather complicated. A new technology to produce the movable parts is developed in our Lab. Firstly the normal LIGA process is used to make the sample with both metal and resist structures. The sacrificial layer pattern will be placed on the sample surface with UV lithography. A metal layer is sputtered on the sample and sacrificial layer surface as a metalized layer. By electroplating, the metalized layer will grow up to the milimeter thickness and be used as the fixed substrate. Finally removing the nonmetal substrate, resist and the sacrificial layer, the movable parts could be completed. As an example, a magnetic gripper structure is designed and fabricated by this method.
学科领域Engineering; Science & Technology - Other Topics; Materials Science; Physics
DOI10.1007/s005420050186
收录类别SCI
WOS类目Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS记录号WOS:000087050500008
引用统计
被引频次:5[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/226546
专题院士
多学科研究中心
推荐引用方式
GB/T 7714
Yi FT,Tang ES,Zhang J,et al. A new sacrificial layer method of LIGA technology to fabricate movable part of a gripper[J]. MICROSYSTEM TECHNOLOGIES,2000,6(4):#REF!.
APA 伊福廷.,唐鄂生.,张静.,冼鼎昌.,Yi, F.,...&Xian, D.(2000).A new sacrificial layer method of LIGA technology to fabricate movable part of a gripper.MICROSYSTEM TECHNOLOGIES,6(4),#REF!.
MLA 伊福廷,et al."A new sacrificial layer method of LIGA technology to fabricate movable part of a gripper".MICROSYSTEM TECHNOLOGIES 6.4(2000):#REF!.
条目包含的文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
1707.pdf(187KB)期刊论文作者接受稿限制开放CC BY-NC-SA请求全文
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[伊福廷]的文章
[唐鄂生]的文章
[张静]的文章
百度学术
百度学术中相似的文章
[伊福廷]的文章
[唐鄂生]的文章
[张静]的文章
必应学术
必应学术中相似的文章
[伊福廷]的文章
[唐鄂生]的文章
[张静]的文章
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。