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STUDIES OF THE MULTILAYER MIRROR REFLECTIVITY IN SOFT-X-RAY REGION
Mou JW(缪建伟); Cui MQ(崔明启); Wang J(王俊); Tang ES(唐鄂生); MIAO, JW; CUI, MQ; WANG, J; TANG, ES
1995
发表期刊ACTA PHYSICA SINICA-OVERSEAS EDITION
卷号4期号:2页码:#REF!
通讯作者MIAO, JW (reprint author), ACAD SINICA,INST HIGH ENERGY PHYS,BEIJING SYNCHROTRON RADIAT FACIL,BEIJING 100039,PEOPLES R CHINA.
摘要Four factors (the interface roughness, the monotonous thickness drift, the interdiffusion between two layers and the change of extinction coefficients) which may affect the multilayer mirror reflectivity in soft X-ray region are investigated. Some conclusions are obtained by our theoretical analysis. In long wavelength region (lambda > 12 nm), the change of extinction coefficients is the main cause reducing the multilayer mirror reflectivity and others (excluding the interface roughness) only shift the peak position. In short wavelength region (lambda < 10 nm), all the four factors affect the reflectivity. In addition, the two factors, monotonous thickness drift and interdiffusion between two layers, shift the peak position. To check these conclusions, the measurement of a Nb/Si multilayer mirror fabricated by our magnet sputtering system is performed on an X-ray generator and a reflectometer installed on the Beijing Synchrotron Radiation Facility. The experimental results are in good agreement with our calculations, and the reflectivity up to 32% of the Nb/Si multilayer mirror (with 41 layers and at wavelength 17.59 nm) is attained.
文章类型Article
学科领域Physics
收录类别SCI
WOS类目Physics, Multidisciplinary
WOS记录号WOS:A1995QN30700008
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文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/226376
专题多学科研究中心
推荐引用方式
GB/T 7714
Mou JW,Cui MQ,Wang J,et al. STUDIES OF THE MULTILAYER MIRROR REFLECTIVITY IN SOFT-X-RAY REGION[J]. ACTA PHYSICA SINICA-OVERSEAS EDITION,1995,4(2):#REF!.
APA 缪建伟.,崔明启.,王俊.,唐鄂生.,MIAO, JW.,...&TANG, ES.(1995).STUDIES OF THE MULTILAYER MIRROR REFLECTIVITY IN SOFT-X-RAY REGION.ACTA PHYSICA SINICA-OVERSEAS EDITION,4(2),#REF!.
MLA 缪建伟,et al."STUDIES OF THE MULTILAYER MIRROR REFLECTIVITY IN SOFT-X-RAY REGION".ACTA PHYSICA SINICA-OVERSEAS EDITION 4.2(1995):#REF!.
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