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A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technology
Yi FT(伊福廷); Peng LQ(彭良强); Zhang JP(张济鹏); Han YL(韩艳龙); Yi, F; Peng, L; Zhang, J; Han, Y
2001
发表期刊MICROSYSTEM TECHNOLOGIES
卷号7期号:3页码:#REF!
通讯作者Yi, F (reprint author), Inst High Energy Phys, BSRF, Beijing 100039, Peoples R China.
文章类型Article
摘要In this paper, a new process to fabricate an electromagnetic stepping micromotor using surface sacrificial layer technology (SSLT) is illustrated, and the SEM photo of the stepping micromotor is showed. The torque of the stepping micromotor with maximum torque of 60 mu Nm is directly calculated by using electromagnetics laws and the law of conservation of energy. The stator and the shaft and the rotor of the micromotor with the material of nickel are first all fabricated by normal LIGA process at the same time. The sacrificial layer structure with the material of AZ resist is made on the surface of the rotor by using SSLT. The stator and the shaft are fixed together with copper substrate instead of the old Ti substrate by electroplating. After removing the Ti substrate, PMMA resist and the sacrificial layer structure, the rotor is separated from the stator and new copper substrate, and can rotate on the new substrate driven by magnetic force. The four coils with 300 turns each are wound on iron bars by hand using microscope and stepping motor. The bars are assembled by hand into the stator holes from rear of new copper substrate to form a magnetic circuit with the stator and the rotor. A power supply with four consecutive pulses provides the current for the coils wound on the iron bars and produces the magnetic force to drive the rotor to run with the speed of 60 rpm.
学科领域Engineering; Science & Technology - Other Topics; Materials Science; Physics
DOI10.1007/s005420100090
收录类别SCI
WOS类目Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS记录号WOS:000172501200004
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被引频次:7[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/226169
专题多学科研究中心
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GB/T 7714
Yi FT,Peng LQ,Zhang JP,et al. A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technology[J]. MICROSYSTEM TECHNOLOGIES,2001,7(3):#REF!.
APA 伊福廷.,彭良强.,张济鹏.,韩艳龙.,Yi, F.,...&Han, Y.(2001).A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technology.MICROSYSTEM TECHNOLOGIES,7(3),#REF!.
MLA 伊福廷,et al."A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technology".MICROSYSTEM TECHNOLOGIES 7.3(2001):#REF!.
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