IHEP OpenIR  > 多学科研究中心
Grazing exit X-ray fluorescence spectroscopy
其他题名掠出射X射线荧光分析方法
Xu Q(徐清); Wei XJ(魏向军); Huang YY(黄宇营); He W(何伟); Xu, Q; Wei, XJ; Huang, YY; He, W
2005
发表期刊HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION
卷号29页码:#REF!
通讯作者Xu, Q (reprint author), Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China.
文章类型Article
摘要In this paper, A grazing exit X-ray fluorescence spectroscopy for thin film analysis was developed by Institute of High Energy Physics, Chinese Academy of Sciences. GEXRF is a new method of instrumental analysis that not only allows determination of the film composition, but also provides information on depth distributions and densities, thickness of films. With grazing-emission X-ray fluorescence, the opposite principle of total reflection X-ray fluorescence is utilized. In this study, X-ray fluorescence (XRF) experiments have been performed for metal thin films (Ni, Ni/Ti) on silicon substrates and a mirror-polished GaAs under the grazing exit condition. The XRF intensity was measured as a function of the exit angle for nearly normal X-ray incidence. The angular dependence of the grazing exit XRF intensity showed a sharp increase at the critical angle of K-alpha, K-beta radiation for the metal film. The applicability of the grazing exit XRF for thin-film analysis was clearly demonstrated.
关键词grazing exit X-ray fluorescence spectroscopy instrument development thin film
学科领域Physics
收录类别SCI
WOS类目Physics, Nuclear ; Physics, Particles & Fields
WOS记录号WOS:000234206900021
引用统计
被引频次:2[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/226006
专题多学科研究中心
推荐引用方式
GB/T 7714
Xu Q,Wei XJ,Huang YY,et al. Grazing exit X-ray fluorescence spectroscopy[J]. HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,2005,29:#REF!.
APA 徐清.,魏向军.,黄宇营.,何伟.,Xu, Q.,...&He, W.(2005).Grazing exit X-ray fluorescence spectroscopy.HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,29,#REF!.
MLA 徐清,et al."Grazing exit X-ray fluorescence spectroscopy".HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION 29(2005):#REF!.
条目包含的文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
973.pdf(371KB)期刊论文作者接受稿限制开放CC BY-NC-SA请求全文
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[徐清]的文章
[魏向军]的文章
[黄宇营]的文章
百度学术
百度学术中相似的文章
[徐清]的文章
[魏向军]的文章
[黄宇营]的文章
必应学术
必应学术中相似的文章
[徐清]的文章
[魏向军]的文章
[黄宇营]的文章
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。