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Study on pores and defect by synthrotron radiation small angle reflection method and slow positron AnnihilationTechnique
其他题名同步辐射小角X射线反射和慢正电子没表征low-k SiOx 薄膜
Zhou CL(周春兰); Wang DN(王丹妮); Ma CX(马创新); Wang BY(王宝义); Wei L(魏龙); He Q(何庆); Jia QJ(贾全杰); Zhou, CL; Wang, DN; Ma, CX; Wang, BY; Wei, L; He, Q; Jia, QJ
2003
发表期刊HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION
卷号27页码:#REF!
通讯作者Wei, L (reprint author), Chinese Acad Sci, Inst High Energy Phys, Beijing 100039, Peoples R China.
文章类型Article
摘要We measured the X-ray small angle refection ( XRR) in Beijing Synchrotron Radiation Facility ( BSRF) and the Doppler broaden of positron in Beijing slow positron beam with Na-22 radiation source for pore SiOx ( 1 less than or equal to x less than or equal to 1.6) film prepared by radio-frequency sputtering at different Ar pressures. The result of XRR showed that with the Ar pressures increasing, densities of films were decreasing and porosity were increasing. Positron annihilation result S parameters were decreasing with Ar increasing, this contributed to the paramagnetic defect E' center reducing Ps production. Comparing with the thickness of films with XRR method and slow positron annihilation analyzing program VEPFIT, it showed that the results were consistency and the result of VEPFIT was samller.
关键词synchrotron radiation XRR slow positron beam sputtering SiOx pore
学科领域Physics
收录类别SCI
WOS类目Physics, Nuclear ; Physics, Particles & Fields
WOS记录号WOS:000220592300016
引用统计
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/225905
专题多学科研究中心
核技术应用研究中心
推荐引用方式
GB/T 7714
Zhou CL,Wang DN,Ma CX,et al. Study on pores and defect by synthrotron radiation small angle reflection method and slow positron AnnihilationTechnique[J]. HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,2003,27:#REF!.
APA 周春兰.,王丹妮.,马创新.,王宝义.,魏龙.,...&Jia, QJ.(2003).Study on pores and defect by synthrotron radiation small angle reflection method and slow positron AnnihilationTechnique.HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,27,#REF!.
MLA 周春兰,et al."Study on pores and defect by synthrotron radiation small angle reflection method and slow positron AnnihilationTechnique".HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION 27(2003):#REF!.
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