Amorphous indium tin oxide films deposited on flexible substrates by facing target sputtering at room temperature
Xiao, Y; Gao, FY; Dong, GB; Guo, TT; Liu, QR; Ye, D; Diao, XG;叶笛
刊名THIN SOLID FILMS
2014
卷号556页码:155-159
关键词Indium tin oxide Facing target sputtering Transparent conductors Polyethylene terephthalate
学科分类Materials Science; Physics
DOI10.1016/j.tsf.2014.01.039
英文摘要Indium tin oxide (ITO) thin films were deposited on polyethylene terephthalate substrates using a DC facing target sputtering (DC-FTS) system at room temperature. The sputtering conditions including oxygen partial pressure and discharge current were varied from 0% to 4% and 0.5 A to 1.3 A, respectively. X-ray diffraction and scanning electron microscopy were used to study the structure and surface morphology of as-prepared films. All the films exhibited amorphous structures and smooth surfaces. The dependence of electrical and optical properties on various deposition parameters was investigated by a linear array four-point probe, Hall-effect measurements, and ultraviolet/visible spectrophotometry. A lowest sheet resistance of 17.4 Omega/square, a lowest resistivity of 3.61 x 10(-4) Omega cm, and an average relative transmittance over 88% in the visible range were obtained under the optimal deposition conditions. The relationship between the Hall mobility (mu) and carrier concentration (n) was interpreted by a functional relation of mu similar to n(-0.127), which indicated that ionized donor scattering was the dominant electron scattering mechanism. It is also confirmed that the carrier concentration in ITO films prepared by the DC-FTS system is mainly controlled by the number of activated Sn donors rather than oxygen vacancies. (C) 2014 Elsevier B. V. All rights reserved.
收录类别SCI
WOS记录号WOS:000333085700025
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被引频次:4[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/225382
专题中国科学院高能物理研究所_实验物理中心_期刊论文
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Xiao, Y,Gao, FY,Dong, GB,et al. Amorphous indium tin oxide films deposited on flexible substrates by facing target sputtering at room temperature[J]. THIN SOLID FILMS,2014,556:155-159.
APA Xiao, Y.,Gao, FY.,Dong, GB.,Guo, TT.,Liu, QR.,...&Diao, XG;叶笛.(2014).Amorphous indium tin oxide films deposited on flexible substrates by facing target sputtering at room temperature.THIN SOLID FILMS,556,155-159.
MLA Xiao, Y,et al."Amorphous indium tin oxide films deposited on flexible substrates by facing target sputtering at room temperature".THIN SOLID FILMS 556(2014):155-159.
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