Fabrication of PDMS micro through-holes using micromolding in open capillaries
Zhou, K; Zhu, XG; Li, Y; Liu, J;刘景
刊名RSC ADVANCES
2014
卷号4期号:60页码:31988-31993
学科分类Chemistry
DOI10.1039/c4ra02498b
英文摘要A modified micromolding process in open capillaries (MIMIOC) is put forward to pattern PDMS through-hole layers. In addition, a transfer technique, which includes changing bonding strengths between each layer by oxygen plasma treatment and surface silanization, is introduced to facilitate the release and bonding of through-holes layers. Its performance is verified by fabricating PDMS through-holes on SU-8 molds with 50-200 mu m microstructures of cube, cylinder and rounded rectangle arrays. The feasibility of the micromolding process and its ability to achieve a planar PDMS layer with protruding angle less than 2 degrees is proved by changes of interfacial free energies and wetting morphology of liquid in micro grooves. As a method with simple structure and low requirements for the equipment, MIMIOC would contribute to the development of MEMS devices by patterning PDMS micro through-holes in a simple and low-cost way.
收录类别SCI
WOS记录号WOS:000341298000063
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被引频次:4[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/225352
专题中国科学院高能物理研究所_多学科研究中心_期刊论文
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Zhou, K,Zhu, XG,Li, Y,et al. Fabrication of PDMS micro through-holes using micromolding in open capillaries[J]. RSC ADVANCES,2014,4(60):31988-31993.
APA Zhou, K,Zhu, XG,Li, Y,&Liu, J;刘景.(2014).Fabrication of PDMS micro through-holes using micromolding in open capillaries.RSC ADVANCES,4(60),31988-31993.
MLA Zhou, K,et al."Fabrication of PDMS micro through-holes using micromolding in open capillaries".RSC ADVANCES 4.60(2014):31988-31993.
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