A study on inorganic phase-change resist Ge2Sb2(1-x)Bi2xTe5 and its mechanism
Li, JZ; 郑黎荣;Zheng, LR; Xi, HZ; Liu, DX; Zhang, HG; Tian, Y; Xie, Y; Zhu, X; Liu, Q
刊名PHYSICAL CHEMISTRY CHEMICAL PHYSICS
2014
卷号16期号:40页码:22281-22286
学科分类Chemistry; Physics
DOI10.1039/c4cp03315a
英文摘要The inorganic phase-change photoresist Ge2Sb1.5Bi0.5Te5 has a tot of advantages such as the two-sides of the photoresist, a large difference in the etching rate between it and Si, and so on, making it a promising candidate for use in the full-vacuum manufacture of the next generation ultra-large scale integrated circuits (ULSI). However, the physical origin of its excellent properties is. still unclear, hindering its improvement and the optimization of its performance. In this work, we extended the Ge2Sb1.5Bi0.5Te5 to Ge2Sb2(1-x)Bi2xTe5 (GSBT, x = 0.1, 0.25, 0.35) and further investigated their properties. Using X-ray diffraction and X-ray absorption fine structure (XAFS) analyses, we built the structures of crystalline and amorphous GSBT, and attributed the excellent physical and chemical properties of crystalline GBST to the different atomic structures compared to amorphous GBST. Moreover, we clarified that the performance of GSBT was enhanced by the increase of Bi, accompanied by a decrease of the phase-change temperature, and gave a criterion for improving GSBT.
收录类别SCI
WOS记录号WOS:000343072800040
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被引频次:6[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/225253
专题中国科学院高能物理研究所_多学科研究中心_期刊论文
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GB/T 7714
Li, JZ,郑黎荣;Zheng, LR,Xi, HZ,et al. A study on inorganic phase-change resist Ge2Sb2(1-x)Bi2xTe5 and its mechanism[J]. PHYSICAL CHEMISTRY CHEMICAL PHYSICS,2014,16(40):22281-22286.
APA Li, JZ.,郑黎荣;Zheng, LR.,Xi, HZ.,Liu, DX.,Zhang, HG.,...&Liu, Q.(2014).A study on inorganic phase-change resist Ge2Sb2(1-x)Bi2xTe5 and its mechanism.PHYSICAL CHEMISTRY CHEMICAL PHYSICS,16(40),22281-22286.
MLA Li, JZ,et al."A study on inorganic phase-change resist Ge2Sb2(1-x)Bi2xTe5 and its mechanism".PHYSICAL CHEMISTRY CHEMICAL PHYSICS 16.40(2014):22281-22286.
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