Photoelectric characteristics of silicon P-N junction with nanopillar texture: Analysis of X-ray photoelectron spectroscopy
Liu J(刘静); Wang JO(王嘉鸥); Yi FT(伊福廷); Liu, J; Wang, JO; Yi, FT; Wu, R; Zhang, N; Kurash, I; Wu R(吴蕊); Zhang N(张念); Kui RX(奎热西)
刊名CHINESE PHYSICS B
2014
卷号23期号:9页码:96101
关键词X-ray photoelectron spectroscopy (XPS) photoelectric characteristic P-N junction silicon nanopillar
学科分类Physics
DOI10.1088/1674-1056/23/9/096101
英文摘要Silicon nanopillars are fabricated by inductively coupled plasma (ICP) dry etching with the cesium chloride (CsCl) islands as masks originally from self-assembly. Wafers with nanopillar texture or planar surface are subjected to phosphorus (P) diffusion by liquid dopant source (POCl3) at 870 degrees C to form P-N junctions with a depth of 300 nm. The X-ray photoelectron spectroscopy (XPS) is used to measure the Si 2p core levels of P-N junction wafer with nanopillar texture and planar surface. With a visible light excitation, the P-N junction produces a new electric potential for photoelectric characteristic, which causes the Si 2p core level to have a energy shift compared with the spectrum without the visible light. The energy shift of the Si 2p core level is -.27 eV for the planar P-N junction and -0.18 eV for the nanopillar one. The difference in Si 2p energy shift is due to more space lattice defects and chemical bond breaks for nanopillar compared with the planar one.
收录类别SCI
WOS记录号WOS:000344057200048
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文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/224902
专题中国科学院高能物理研究所_多学科研究中心_期刊论文
中国科学院高能物理研究所_多学科研究中心
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Liu J,Wang JO,Yi FT,et al. Photoelectric characteristics of silicon P-N junction with nanopillar texture: Analysis of X-ray photoelectron spectroscopy[J]. CHINESE PHYSICS B,2014,23(9):96101.
APA 刘静.,王嘉鸥.,伊福廷.,Liu, J.,Wang, JO.,...&奎热西.(2014).Photoelectric characteristics of silicon P-N junction with nanopillar texture: Analysis of X-ray photoelectron spectroscopy.CHINESE PHYSICS B,23(9),96101.
MLA 刘静,et al."Photoelectric characteristics of silicon P-N junction with nanopillar texture: Analysis of X-ray photoelectron spectroscopy".CHINESE PHYSICS B 23.9(2014):96101.
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