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Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens
Huang, QS; Li, HC; Song, ZQ; Zhu, JT; Wang, ZS; Li, AG; Yan, SA; Mao, CW; Wang, H; Yan, F; Zhang, L; Yu, XH; Liu, P; Li, M; 李明(多); 刘鹏(多); Huang, QS; Li, HC; Song, ZQ; Zhu, JT; Wang, ZS; Li, AG; Yan, SA; Mao, CW; Wang, H; Yan, F; Zhang, L; Yu, XH; Liu, P; Li, M; 李明(多); 刘鹏(多)
2013
发表期刊CHINESE PHYSICS C
卷号37期号:2页码:28002
摘要The multilayer Laue lens (MLL) is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9 mu m-thick MLL with the outmost layer thickness of 15 nm is designed based on dynamical diffraction theory. The MLL is fabricated by first depositing the depth-graded multilayer using direct current (DC) magnetron sputtering technology. Then, the multilayer sample is sliced, and both cross-sections are thinned and polished to a depth of 35-41 mu m. The focusing property of the MLL is measured at the Shanghai Synchrotron Facility (SSRF). One-dimensional (1D) focusing resolutions of 205 nm and 221 nm are obtained at E=14 keV and 18 keV, respectively. It demonstrates that the fabricated MLL can focus hard X-rays into nanometer scale.
关键词nano-focusing hard X-ray multilayer Laue lens synchrotron radiation diffraction
学科领域Physics
DOI10.1088/1674-1137/37/2/028002
收录类别SCI
语种英语
WOS记录号WOS:000320547600018
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被引频次:4[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/224750
专题多学科研究中心
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GB/T 7714
Huang, QS,Li, HC,Song, ZQ,et al. Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens[J]. CHINESE PHYSICS C,2013,37(2):28002.
APA Huang, QS.,Li, HC.,Song, ZQ.,Zhu, JT.,Wang, ZS.,...&刘鹏.(2013).Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens.CHINESE PHYSICS C,37(2),28002.
MLA Huang, QS,et al."Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens".CHINESE PHYSICS C 37.2(2013):28002.
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