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Helium-Related Defect Evolution in Titanium Films by Slow Positron Beam Analysis
Li, Y; Deng, AH; Zhou, YL; Zhou, B; Wang, K; Hou, Q; Shi, LQ; Qin, XB; Wang, BY;秦秀波; Wang BY(王宝义)
2012
发表期刊CHINESE PHYSICS LETTERS
卷号29期号:4页码:47801
摘要Various helium-containing titanium films were deposited on Si substrates by magnetron sputtering under different helium/argon (He/Ar) ambiances. Helium concentrations and corresponding depth profiles in the Ti films are obtained by elastic recoil detection analysis (ERDA). X-ray diffraction (XRD) measurements are carried out to evaluate the crystallization of the titanium films. Vacancy-type defects and their depth profiles were revealed by slow positron beam analysis (SPBA). It is found that the defect-characteristic parameter S rises with the increment of the He/Ar flow ratios. The variation of.. indicates the formation and evolution of various He-related defects, with uniform distribution into the depth around 400 nm.
学科领域Physics
DOI10.1088/0256-307X/29/4/047801
收录类别SCI
WOS记录号WOS:000302877000057
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被引频次:6[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ihep.ac.cn/handle/311005/224553
专题核技术应用研究中心
推荐引用方式
GB/T 7714
Li, Y,Deng, AH,Zhou, YL,et al. Helium-Related Defect Evolution in Titanium Films by Slow Positron Beam Analysis[J]. CHINESE PHYSICS LETTERS,2012,29(4):47801.
APA Li, Y.,Deng, AH.,Zhou, YL.,Zhou, B.,Wang, K.,...&王宝义.(2012).Helium-Related Defect Evolution in Titanium Films by Slow Positron Beam Analysis.CHINESE PHYSICS LETTERS,29(4),47801.
MLA Li, Y,et al."Helium-Related Defect Evolution in Titanium Films by Slow Positron Beam Analysis".CHINESE PHYSICS LETTERS 29.4(2012):47801.
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